1.产 品 资 料 介 绍：
AMAT 0190-10114W发电机 产品英文
AMAT 0190-0114W RF Plasma Generator Product Features
Introduction: AMAT 0190-0114W is a dedicated original RF plasma generator for semiconductor etching and thin film deposition equipment, which stably outputs RF energy and ensures wafer process consistency. Its core features are as follows:
The power output is linearly adjustable, with small power fluctuations and stable plasma state
Built in high-precision power closed-loop feedback, real-time correction of output power values
Adapt to standard semiconductor process frequencies and match cavity plasma excitation requirements
Multiple hardware protections, automatic shutdown interlock for over power, standing wave, and over temperature
Equipped with RS485 and device specific bus, it can be connected to the upper control system of the whole machine
Built in multiple sets of process formula storage, one click switching between different process programs
Low harmonic output design to reduce workshop RF electromagnetic interference
Integrated air-cooled cooling structure, controllable temperature rise during long-term full load operation
Built in fault self checking program, error code quickly locates the fault location
Standard cabinet rack size, rail mounted installation, easy disassembly and maintenance
Impedance adaptive matching circuit reduces process debugging and matching time
Industrial dust-proof sealed body, suitable for dust-free semiconductor workshop environment
Soft start output function to avoid instantaneous high voltage impact on chamber components
Original matching AMAT mass production process platform, no additional modification required for adaptation
High precision power acquisition, accurate recording of process energy parameters for each wafer
Conclusion: AMAT 0190-0114W has stable output and complete protection, and is a core RF power supply component for semiconductor thin film and etching processes.
AMAT 0190-10114W发电机 产品展示
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| PMB31D-20200-01 | AMAT 0100-1401 | P22NSXA-LNF-NS-02 |
| PMB31D-20200-00 | AMAT 0100-01415 | 57120001-KN DSTA 133 |
| PMB31D-201YY-10 | PMKHRMPBA10001 | M21NRXA-LSN-M1-03 |
| PMB31D-20116-03 | AMAT 0100-20135 | 57160001-UY DSDI 110F |
| PMB31D-20116-02 | Amat 0100-20213 | P22NRXA-LDS-M1-02 |
| PMB31D-20116-01 | 07KT92 | 57160001-ADS DSTD 186 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
