1.产 品 资 料 介 绍：
VAT 09040-PE44-AOF 高压闸阀产品特点
- 原装双作用气动驱动，适配 6-9bar 标准洁净压缩空气供气
- 不锈钢整体阀体，耐酸碱工艺气体腐蚀，适配无尘车间
- 超低漏率密封结构，阀体漏率满足超高真空工况标准
- 内置保护环防粉尘沉积，减少闸板积污，延长维护周期
- 压差启闭设计，最大 1bar 压差下可平稳开启无卡滞
- FKM 耐温密封件，阀体最高耐受 150℃工艺高温环境
- 直通大口径流道，气流阻力小，真空抽气效率高
- 集成位置反馈信号，实时传输阀门全开 / 全关状态
- 波纹管隔离传动结构，杜绝油脂污染真空腔体
- 楔形闸板自清洁结构，启闭时自动刮除表面沉积物
- 标准化 ISO-F 法兰接口，拆装替换无需改装管路
- 抗射频电磁干扰，适配机台射频电源周边安装
- 低磨损运动部件，数十万次循环启闭不易故障
- 配套原厂电磁阀模组，接线简单可直连设备主控
- 双向密封通流，管路正反安装均可稳定隔绝真空结尾：VAT 09040-PE44-AOF 密封可靠、耐工艺腐蚀，是半导体真空产线主流隔离闸阀配件。
VAT 09040-PE44-AOF高压闸阀 产品英文
Product Features of VAT 09040-PE44-AOF High Pressure Gate Valve
Introduction: VAT 09040-PE44-AOF is a pneumatic high-pressure gate valve specifically designed for semiconductor vacuum equipment, suitable for controlling the on/off of vacuum pipelines in etching and coating machines.
Original dual acting pneumatic drive, compatible with 6-9bar standard clean compressed air supply
Stainless steel integral valve body, resistant to acid and alkali process gas corrosion, suitable for dust-free workshops
Ultra low leakage rate sealing structure, valve body leakage rate meets ultra-high vacuum working condition standards
Built in protective ring to prevent dust deposition, reduce gate fouling, and extend maintenance cycle
Differential pressure opening and closing design, capable of smooth opening without jamming under a maximum pressure difference of 1 bar
FKM temperature resistant seal, valve body can withstand up to 150 ℃ process high temperature environment
Straight through large-diameter flow channel, low airflow resistance, high vacuum pumping efficiency
Integrated position feedback signal, real-time transmission of valve fully open/closed status
Bellows isolation transmission structure to prevent grease contamination of the vacuum chamber
Wedge gate self-cleaning structure, automatically scrapes off surface sediment when opening and closing
Standardized ISO-F flange interface, disassembly and replacement do not require pipeline modification
Anti RF electromagnetic interference, suitable for installation around the RF power supply of the machine
Low wear moving parts, with hundreds of thousands of cycles of opening and closing, are not prone to failure
Equipped with original electromagnetic valve module, simple wiring can be directly connected to the equipment main control
Bidirectional sealed flow, both positive and negative installation of pipelines can stably isolate vacuum
Conclusion: VAT 09040-PE44-AOF has reliable sealing and process corrosion resistance, and is a mainstream isolation gate valve accessory for semiconductor vacuum production lines.
VAT 09040-PE44-AOF高压闸阀 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
