1.产 品 资 料 介 绍：
Nikon S9037-0902N 图像传感器
简介
- 512×4 像素，24μm 大尺寸感光单元
- 背照式设计，紫外波段感光效率高
- 无窗封装，适配机台内部真空光路
- 10MHz 高速读取，匹配光刻机高速扫描
- 光谱覆盖 200–1100nm，适配深紫外光源
- 支持像素合并模式，提升采集速度
- 峰值量子效率超 90%，微弱光信号识别强
- 低读出噪声，测量光斑误差极小
- 金属陶瓷密封封装，无尘真空环境稳定
- 24 针直插引脚，对接尼康光路信号板
- 内置片上放大器，信号传输无衰减
- 无制冷款，常温长时间连续工作
- 低暗电流，长时间曝光无杂点干扰
- 耐洁净车间微量紫外辐照老化
- 适配 NSR-S620D 等尼康浸润式光刻机
结尾
Nikon S9037-0902N图像传感器 产品英文
Nikon S9037-0902N Image Sensor
Introduction
Hamamatsu produces a windowless back illuminated CCD image sensor specifically designed for Nikon ArF immersion lithography machines, used for detecting and locating light spots in the lithography optical path.
512 × 4 pixels, 24 μ m large-sized photosensitive unit
Back illuminated design, high UV sensitivity efficiency
Window free packaging, compatible with the internal vacuum light path of the machine
10MHz high-speed reading, matched with high-speed scanning of lithography machine
Spectral coverage of 200-1100nm, suitable for deep ultraviolet light sources
Support pixel merging mode to improve acquisition speed
Peak quantum efficiency exceeds 90%, strong recognition of weak optical signals
Low readout noise, minimal measurement spot error
Metal ceramic sealed packaging, dust-free and stable vacuum environment
24 pin direct insertion pin, compatible with Nikon optical signal board
Built in on-chip amplifier, signal transmission without attenuation
No cooling system, continuous operation at room temperature for a long time
Low dark current, long-term exposure without interference from impurities
Anti clean workshop micro UV irradiation aging
Compatible with Nikon immersion lithography machines such as NSR-S620D
ending
S9037-0902N is sensitive to light and has a fast collection speed. It is a core optical sensing component for optical path alignment and spot monitoring in lithography machines.
Nikon S9037-0902N图像传感器 产品展示
视频展示
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