1.产 品 资 料 介 绍：
MKS AS00497-AB通信模块 产品英文
MKS AS00497-AB Communication Module
Introduction: This MKS communication interlock board is compatible with semiconductor equipment and is responsible for vacuum and gas signal transmission, as well as safety interlock control.
Original CDN497 series board, matched with AMAT film and etching machine
Equipped with DeviceNet bus to achieve data exchange between flow meters and pressure gauges
Multi channel digital input and output, collecting various safety switch signals of the cavity
Built in hardware interlock logic, quick triggering of device protection in abnormal working conditions
The circuit is equipped with isolation protection to isolate electromagnetic interference in the workshop and avoid signal distortion
Onboard status indicator light, quickly locate communication and channel fault points
Real time upload of traffic and vacuum data for monitoring the process by the upper computer
Integrated multiple circuit protection against overvoltage, static electricity, and short circuit
Standard VME card insertion structure, easy disassembly and replacement of cabinet slots
High temperature resistant substrate, suitable for long-term continuous high temperature environment in equipment cabin
Single channel independent isolation, single channel failure does not affect the overall operation of the machine
Reinforcement welding process, equipment vibration environment is not easy to break or detach
Multi layer precision PCB routing reduces signal crosstalk issues
Corrosion resistant coating on the board surface, resistant to trace corrosive gases in the manufacturing process
Coordinate vacuum valves, mass flow meters, and chamber safety linkage signals
Conclusion: MKS AS00497-AB has stable communication and reliable interlocking, and is a core signal spare part for semiconductor vacuum systems.
MKS AS00497-AB通信模块 产品展示
视频展示
中文产品
GE IS230TCISH6C控制模块
Cisco IE-4000-16GT4G-E以太网交换机
SCHNEIDER BMEP585040控制模块
KOKUSAI SMPCONT-A3B Main control circuit board
ALSTOM UT150-1 Control card
EATON XV-442-57CQB-1-10 control panel
| AMAT 0100-76109 | TP-4798-2 | CC-PCNT02 51454551-275 |
| AMAT 0100-09291 | TP-4799-3 | 853-150806-001 |
| AMAT 0100-09017 | TP-2295-0 | RET620E-1G NBTNAANNNBA |
| AMAT 0100-71320 | TP-8144-2 | GS1127 244-127-000-017-A2-B |
| AMAT 0100-90025 | TP-2303-3 | 685-247270-101 |
| AMAT 0100-00206 | TP-2323-2 | V7768-320001 350-930100776 |
| AMAT 0100-01950 | PRS-2796B | V7768-320000 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
