1.产 品 资 料 介 绍：
3D80-000006-V1 气动狭缝阀
- 适配东京电子工艺设备，原装匹配无装配偏差
- 气动驱动结构，依靠洁净气源完成阀板启闭
- 阀腔电解抛光处理，洁净度高、产尘量极低
- 高端氟橡胶密封，超高真空下漏率表现优异
- 内置位置传感器，实时反馈阀门开 / 关状态
- 启闭动作速度快，缩短晶圆传输等待时长
- 滚柱凸轮传动，百万次循环使用寿命持久
- 一体不锈钢阀体，耐受微量腐蚀工艺气体
- 波纹管隔离传动结构，杜绝外部杂质入真空
- 标准化法兰接口，腔体拆装更换便捷
- 适配高真空工况，稳定隔绝不同压力腔室
- 低摩擦导向组件，运行平稳无卡顿异响
- 适配 24 小时不间断量产，长期运行稳定
- 配套标准气动接头，气路布线简单规范
- 用于负载锁与工艺腔之间晶圆输送隔离结尾：3D80-000006-V1 密封性强、洁净耐用，是半导体集群设备核心真空传输阀备件。
3D80-000006-V1气动狭缝阀 产品英文
3D80-00006-V1 pneumatic slit valve
Introduction: This TEL original pneumatic slit valve is used for semiconductor vacuum chambers, isolating chambers, and completing wafer vacuum transfer.
Compatible with Tokyo electronic process equipment, original matching without assembly deviation
Pneumatic drive structure, relying on clean air source to complete valve plate opening and closing
Valve chamber electrolytic polishing treatment, high cleanliness and extremely low dust production
High end fluororubber seal, excellent leakage rate under ultra-high vacuum
Built in position sensor, providing real-time feedback on valve opening/closing status
Fast opening and closing action speed, reducing the waiting time for wafer transfer
Roller cam transmission, with a long-lasting service life of millions of cycles
One piece stainless steel valve body, resistant to trace corrosive process gases
Bellows isolation transmission structure to prevent external impurities from entering the vacuum
Standardized flange interface, convenient disassembly and replacement of cavity
Adapt to high vacuum conditions, stably isolate different pressure chambers
Low friction guiding component, running smoothly without any jamming or abnormal noise
Suitable for 24-hour uninterrupted mass production and stable long-term operation
Supporting standard pneumatic connectors, simple and standardized pneumatic wiring
Used for wafer transport isolation between load lock and process chamber
Conclusion: 3D80-00006-V1 has strong sealing, cleanliness and durability, and is a spare part for the core vacuum transmission valve of semiconductor cluster equipment.
3D80-000006-V1气动狭缝阀 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
