TIMBRE CANPUS 2L87-127727-V1控制器模块
1.产 品 资 料 介 绍：
TIMBRE CANPUS 2L87-127727-V1 控制器模块
- TIMBRE CANPUS 2L87-127727-V1 适配半导体等离子射频配套控制
- 24VDC 标准供电，适配晶圆设备机柜供电体系
- 搭载网口、SMA 射频接口，信号收发一体
- 内置电路滤波，隔绝车间射频与电磁干扰
- 实时监测射频功率、驻波比运行数据
- 自带熔丝过流保护，短路自动断电防护
- 内置故障自检，异常状态直观显示识别
- 一体化箱体带散热孔，长时间运行控温稳定
- 以太网通讯，可对接整机主控上位系统
- 射频信号隔离设计，避免腔体信号串扰
- 标准化箱体尺寸，机柜拆装替换便捷
- 适配刻蚀、薄膜沉积等离子工艺工况
- 金属密封外壳，防尘适配无尘洁净车间
- 出厂整机老化校准，上机调试简单
- 兼容同系列 CANOPUS 控制单元，替换通用性强综上，TIMBRE CANPUS 2L87-127727-V1 控制器模块射频控制稳定、防护完善，是半导体等离子设备专用配套控制器
TIMBRE CANPUS 2L87-127727-V1控制器模块 产品英文
TIMBRE CANPUS 2L87-127727-V1 Controller Module
TIMBRE CANPUS 2L87-127727-V1 is compatible with semiconductor plasma RF matching control
24VDC standard power supply, compatible with wafer equipment cabinet power supply system
Equipped with Ethernet port and SMA RF interface, integrated signal transmission and reception
Built in circuit filtering to isolate workshop RF and electromagnetic interference
Real time monitoring of RF power and standing wave ratio operation data
Comes with fuse overcurrent protection and short circuit automatic power-off protection
Built in fault self check, intuitive display and recognition of abnormal states
Integrated box with heat dissipation holes, stable temperature control during long-term operation
Ethernet communication, can be connected to the main control upper system of the whole machine
RF signal isolation design to avoid crosstalk of cavity signals
Standardized box size, easy disassembly and replacement of cabinets
Adapt to the working conditions of etching and thin film deposition plasma processes
Metal sealed shell, dust-proof and suitable for dust-free clean workshops
Factory aging calibration of the entire machine, simple machine debugging
Compatible with CANOPUS control units of the same series, with strong versatility for replacement
In summary, the TIMBRE CANPUS 2L87-127727-V1 controller module has stable RF control and complete protection, making it a dedicated supporting controller for semiconductor plasma equipment
TIMBRE CANPUS 2L87-127727-V1控制器模块 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
