1.产 品 资 料 介 绍:
TEL 3Z80-000653-V4 处理器模块
TEL 3Z80-000653-V4 适配 TEL 刻蚀、薄膜沉积设备主控运算
高速采集腔体压力、温区、气体流量各类传感信号
自带信号隔离滤波,抵御车间电磁干扰
多总线同步通讯,联动整机各类子板卡协同运行
独立执行整套工艺逻辑,精准管控设备流程时序
实时全通道自检,线路异常快速上报报警信息
标准插卡式结构,拆装替换简单省时
搭载多重电气防护,过压过流过热自动保护
无尘 PCB 工艺生产,满足洁净厂房使用标准
板载存储芯片,稳定存储长期工艺运行参数
线路散热优化,支持 24 小时不间断连续工作
兼容 3Z80 同系列整套控制系统,拓展适配性强
可对接上位机与产线 MES,工艺数据互通顺畅
出厂全功能检测校准,现场装机调试简单
板卡体型紧凑,节约控制柜内部安装空间
综上,TEL 3Z80-000653-V4 处理器模块算力稳定、防护齐全,是东京电子半导体工艺设备核心运算板卡
TEL 3Z80-000653-V4 处理器模块 产品英文
TEL 3Z80-000653-V4 processor module
TEL 3Z80-000653-V4 is compatible with TEL etching and thin film deposition equipment main control operation
High speed acquisition of various sensing signals such as chamber pressure, temperature zone, and gas flow rate
Equipped with signal isolation filtering to resist electromagnetic interference in the workshop
Multi bus synchronous communication, coordinated operation of various sub boards in the whole machine
Independently execute the entire process logic and accurately control the timing of equipment flow
Real time full channel self check, quickly report alarm information for line abnormalities
Standard plug-in card structure, easy to disassemble and replace, time-saving
Equipped with multiple electrical protections, automatic protection against overvoltage, overcurrent, and overheating
Production using dust-free PCB technology, meeting the standards for clean room use
Onboard storage chip, stable storage of long-term process operation parameters
Line heat dissipation optimization, supporting 24-hour uninterrupted continuous operation
Compatible with the entire control system of 3Z80 series, with strong adaptability for expansion
Can be connected to the upper computer and MES on the production line, ensuring smooth communication of process data
Factory full function testing and calibration, easy on-site installation and debugging
Compact board shape, saving installation space inside the control cabinet
Overall, the TEL 3Z80-000653-V4 processor module has stable computing power and complete protection, making it the core computing board of Tokyo Electronic Semiconductor Process Equipment
TEL 3Z80-000653-V4 处理器模块 产品展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218



