1.产 品 资 料 介 绍：
TEL CX80-001366-V1 驱动组件
- TEL CX80-001366-V1 适配东京电子薄膜、刻蚀设备晶圆传送机构
- 集成伺服驱动与信号转接，直接驱动机台搬运伺服电机
- 三闭环运动控制，晶圆移动定位误差小、启停无抖动
- 内置 EMC 隔离滤波，抵御车间射频、电磁信号干扰
- 多路编码器反馈接口，实时读取电机位置转速数据
- 过流、过压、过热、短路多重自动保护电路
- 标准总线通讯，对接整机主控同步执行工艺动作
- 无尘 PCB 制程，低释气适配半导体洁净厂房工况
- 一体化模组结构，机柜插拔拆装更换简便快速
- 优化散热线路，支持设备 24 小时不间断连续运行
- 自带故障代码自检，快速定位驱动线路异常点位
- 宽电压适配，电网小幅波动下输出功率稳定
- 可联动真空、预对准单元协同完成晶圆流转流程
- 出厂完成匹配校准，现场装机无需复杂参数调试
- 整体尺寸紧凑，节约设备控制柜内部安装空间综上，TEL CX80-001366-V1 驱动组件运动控制精准、防护齐全，是 TEL 半导体设备晶圆搬运系统专用动力驱动单元
TEL CX80-001366-V1驱动组件 产品英文
TEL CX80-001366-V1 driver component
TEL CX80-001366-V1 is compatible with the wafer transfer mechanism of Tokyo Electronic Thin Film and Etching Equipment
Integrated servo drive and signal conversion, directly driving the machine handling servo motor
Three loop motion control, small wafer movement positioning error, no shaking during start stop operation
Built in EMC isolation filter to resist workshop RF and electromagnetic signal interference
Multi channel encoder feedback interface, real-time reading of motor position and speed data
Multiple automatic protection circuits for overcurrent, overvoltage, overheating, and short circuit
Standard bus communication, docking with the main control of the whole machine to synchronously execute process actions
Dust free PCB process, low gas release suitable for semiconductor cleanroom conditions
Integrated module structure, easy and fast insertion, removal, and replacement of cabinets
Optimize the heat dissipation circuit to support 24-hour uninterrupted continuous operation of the device
Self check with built-in fault code, quickly locate abnormal points in the drive circuit
Wide voltage adaptation, stable output power under small fluctuations in the power grid
Can collaborate with vacuum and pre alignment units to complete the wafer transfer process
Factory matching and calibration are completed, and on-site installation does not require complex parameter debugging
Compact overall size, saving installation space inside the equipment control cabinet
In summary, the TEL CX80-001366-V1 driver component has precise motion control and complete protection, making it a dedicated power drive unit for TEL semiconductor equipment wafer handling systems
TEL CX80-001366-V1驱动组件 产品展示
视频展示
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| AMAT 0020-39499 | AMAT 0190-36093 | AMAT 0190-13128 |
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| AMAT 0190-34282 | AMAT 0190-36181 | AMAT 0190-13139 |
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| AMAT 0190-76276 | AMAT 0190-36253 | AMAT 0190-13213 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
