1.产 品 资 料 介 绍：
Novellus 02-351554-00 动态控制器
- Novellus 02-351554-00 适配诺发 CVD/PVD 沉积设备运动动态管控
- 闭环高速动态调节，实时修正晶圆台运行偏差
- 高频率信号采样，捕捉细微位移、震动变化
- 内置电磁隔离滤波，抵御车间射频干扰
- 多路编码器反馈接口，精准采集轴位数据
- 集成过流、超速、过热多重安全保护
- 专用总线对接整机主控，同步工艺动作时序
- 无尘工业线路板，低释气适配洁净厂房
- 模块化插卡设计，机柜拆装更换便捷
- 内置故障自检代码，快速定位运动异常
- 适配晶圆载台、机械手多轴联动控制
- 优化散热线路，支持 24 小时连续满载运行
- 存储动态工艺参数，断电数据不丢失
- 出厂整机匹配校准，现场调试步骤简单
- 板卡尺寸紧凑，节省控制柜内部安装空间综上，Novellus 02-351554-00 动态控制器动态调节精准、运行稳定，是诺发半导体沉积设备专用运动控制板卡
Novellus 02-351554-00动态控制器 产品英文
Novellus 02-351554-00 Dynamic Controller
Novellus 02-351554-00 is compatible with the dynamic control of motion for Nofa CVD/PVD deposition equipment
Closed loop high-speed dynamic adjustment, real-time correction of operating deviation of the wafer stage
High frequency signal sampling to capture subtle displacement and vibration changes
Built in electromagnetic isolation filter to resist workshop RF interference
Multi channel encoder feedback interface, precise acquisition of axis position data
Integrated multiple safety protections for overcurrent, overspeed, and overheating
Dedicated bus docking with the main control of the entire machine, synchronizing the timing of process actions
Dust free industrial circuit board, low gas release suitable for clean workshops
Modular card insertion design, convenient disassembly and replacement of cabinets
Built in fault self check code, quickly locate abnormal movement
Adapt to wafer stage and multi axis linkage control of robotic arm
Optimize the cooling circuit and support 24-hour continuous full load operation
Store dynamic process parameters without losing power-off data
Factory matching and calibration of the entire machine, with simple on-site debugging steps
Compact board size, saving installation space inside the control cabinet
In summary, the Novellus 02-351554-00 dynamic controller has precise dynamic adjustment and stable operation, making it a dedicated motion control board for Nofa Semiconductor deposition equipment
Novellus 02-351554-00动态控制器 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
