1.产 品 资 料 介 绍：
NSK M-EDC-PN2012AB5F7 伺服驱动控制器
- NSK M-EDC-PN2012AB5F7 适配 NSK PN2012 中空直驱 DD 马达，用于晶圆定位工位
- 超高分辨率闭环控制，单圈 262 万计数，分度定位误差极小
- 支持脉冲、串口、模拟量多类上位指令输入，适配各类工控系统
- 内置 256 组运动程序通道，可预存多套晶圆流转工艺动作
- 电子齿轮可调倍率宽，多轴同步联动运行无偏移
- 多路光电隔离 IO，集成急停、限位、伺服使能安全信号
- 搭载过流、超速、过温、过载多重自动保护机制
- RS232 通讯接口，支持软件监控、参数修改与故障读取
- 内部 EMC 滤波，隔绝车间射频、电磁信号干扰
- 动态制动功能，断电快速锁止转盘，防止晶圆移位
- 超薄紧凑型机身，机柜导轨安装，拆装替换便捷
- 200-230V 单相工业供电，适配半导体厂房配电标准
- 原点快速回零算法，缩短设备换片等待时长
- 无尘级内部线路，低释气适配洁净生产车间
- 出厂匹配 PN 系列电机校准，上机简单调试即可投产综上，NSK M-EDC-PN2012AB5F7 伺服驱动控制器定位精度高、程序存储量大，是半导体晶圆预对准、旋转载台专用直驱驱动单元
Novellus 02-351554-00动态控制器 产品英文
NSK M-EDC-PN2012AB5F7 servo drive controller
NSK M-EDC-PN2012AB5F7 is compatible with NSK PN2012 hollow direct drive DD motor for wafer positioning station
Ultra high resolution closed-loop control, 2.62 million counts per cycle, with minimal indexing and positioning errors
Supports multiple types of upper level command inputs including pulse, serial port, and analog, and is compatible with various industrial control systems
Built in 256 sets of motion program channels, capable of pre storing multiple sets of wafer transfer process actions
Electronic gear with adjustable magnification width, multi axis synchronous linkage operation without offset
Multi channel optoelectronic isolation IO, integrated emergency stop, limit, servo enable safety signals
Equipped with multiple automatic protection mechanisms for overcurrent, overspeed, overheating, and overload
RS232 communication interface, supporting software monitoring, parameter modification, and fault reading
Internal EMC filtering to isolate workshop RF and electromagnetic signal interference
Dynamic braking function, quick locking of the turntable upon power failure to prevent wafer displacement
Ultra thin and compact body, cabinet rail installation, easy disassembly and replacement
200-230V single-phase industrial power supply, compatible with semiconductor factory distribution standards
Fast zeroing algorithm for origin, reducing the waiting time for device replacement
Dust free internal circuit, low gas release suitable for clean production workshops
Factory matched PN series motor calibration, easy debugging on the machine to put into production
Overall, the NSK M-EDC-PN2012AB5F7 servo drive controller has high positioning accuracy and large program storage capacity, making it a dedicated direct drive unit for semiconductor wafer pre alignment and rotating stage
Novellus 02-351554-00动态控制器 产品展示
视频展示
中文产品
DT602 GJR2911200R1模拟量输入模块
SA9923a-E HIEE450964R0001处理器模块
GD9924BE V2 HIEE401091R0002控制器
5X00063G01 Ovation analog module
Reliance DDS-LPS Interface component module
DS200FGPAG1AHD combustion engine card
| AMAT 0190-25087 | AMAT 0190-38451 | AMAT 0190-14048 |
| AMAT 0190-09484 | AMAT 0190-38516 | AMAT 0190-14049 |
| 3BHB007211R115 | AMAT 0190-38517 | AMAT 0190-14050 |
| 3BHB007209R0105 | AMAT 0190-38517 | AMAT 0190-14092 |
| XVC767AE105 | AMAT 0190-38912 | AMAT 0190-14163 |
| BENTLY 138607-02 | AMAT 0190-38992 | AMAT 0190-14178 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
