1.产 品 资 料 介 绍：
TEL 2L87-085048-V1 加热控制器产品特点
- 高精度闭环控温，温度波动小
- 专用适配 TEL 刻蚀、沉积设备整机
- 多路温度信号采集，支持多传感器接入
- 内置信号滤波，抗设备电磁干扰
- 超温、断线实时故障检测报警
- 自带硬件联锁，异常自动切断加热
- 标准设备总线通讯，对接主控系统
- 紧凑型板卡式结构，机柜易装配
- 宽工况温区，适配半导体高温工艺
- 隔离电路设计，保护主板与加热负载
- 精准功率调节，加热升温平缓可控
- 工艺参数存储，断电数据不丢失
- 标准化接口端子，拆装接线简便
- 工业耐用元器件，长期连续运行稳定
- 原厂配套程序，无需额外调试适配结尾：TEL 2L87-085048-V1 专为半导体产线打造，是腔体加热恒温控制核心部件。
TEL 2L87-085048-V1加热控制器 产品英文
TEL 2L87-085048-V1 Heating Controller Product Features
Introduction: TEL 2L87-085048-V1 is a dedicated heating control module for semiconductor equipment, with stable temperature control and suitable for wafer process temperature control scenarios.
High precision closed-loop temperature control with minimal temperature fluctuations
Specially adapted TEL etching and deposition equipment
Multi channel temperature signal acquisition, supporting multi-sensor access
Built in signal filtering, resistant to electromagnetic interference from devices
Real time fault detection and alarm for overheating and wire breakage
Equipped with hardware interlocking, automatically cuts off heating in case of abnormal conditions
Standard equipment bus communication, docking with the main control system
Compact board card structure, easy to assemble cabinet
Wide operating temperature range, suitable for semiconductor high-temperature processes
Isolation circuit design to protect the motherboard and heating load
Accurate power regulation, smooth and controllable heating and warming up
Process parameter storage, no loss of power-off data
Standardized interface terminals, easy to disassemble and connect
Durable industrial components, stable long-term continuous operation
Original factory supporting program, no need for additional debugging and adaptation
Conclusion: TEL 2L87-085048-V1 is specially designed for semiconductor production lines and is the core component of cavity heating and constant temperature control.
TEL 2L87-085048-V1加热控制器 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
