1.产 品 资 料 介 绍：
AMAT 0090-A1161 射频控制器产品特点
- 功率输出精准，功率波动幅度小
- 搭配匹配网络，降低射频反射损耗
- 实时监测腔体负载，自动调节输出
- 内置过流、过温、短路多重保护
- 金属屏蔽外壳，抵御设备电磁干扰
- 标准设备总线，对接整机主控系统
- 板卡式紧凑结构，机柜拆装便捷
- 工艺参数本地存储，断电数据留存
- 低谐波输出，不干扰周边精密元件
- 洁净级元器件，适配无尘车间工况
- 宽温稳定运行，支持 24 小时连续工作
- 自带故障自检，快速上报异常代码
- 原厂配套协议，无需额外调试适配
- 50Ω 标准阻抗，射频传输匹配度高
- 模块化结构，维修更换省时省力结尾：AMAT 0090-A1161 为等离子工艺核心控制部件，多用于 AMAT 系列半导体沉积、刻蚀设备。
AMAT 0090-A1161射频控制器 产品英文
AMAT 0090-A1161 RF Controller Product Features
Introduction: AMAT 0090-A1161 is a dedicated RF control module for semiconductor equipment, which stably outputs RF energy and is compatible with wafer etching and coating processes.
Accurate power output with minimal power fluctuations
Paired with matching network to reduce RF reflection loss
Real time monitoring of chamber load, automatic adjustment of output
Built in multiple protections for overcurrent, overheating, and short circuit
Metal shielding shell to resist electromagnetic interference from equipment
Standard equipment bus, connected to the main control system of the whole machine
Compact board structure, easy disassembly and assembly of cabinet
Local storage of process parameters and retention of power-off data
Low harmonic output, does not interfere with surrounding precision components
Clean grade components, suitable for dust-free workshop conditions
Wide temperature stable operation, supporting 24-hour continuous work
Built in fault self check, quickly report abnormal codes
Original factory matching agreement, no additional debugging and adaptation required
50 Ω standard impedance, high RF transmission matching
Modular structure, saving time and effort in maintenance and replacement
Conclusion: AMAT 0090-A1161 is a core control component for plasma processes, commonly used in AMAT series semiconductor deposition and etching equipment.
AMAT 0090-A1161射频控制器 产品展示
视频展示
中文产品
110 TAS.580.0540G00直流电源模块
SEW DFS56L TF RH1M KK伺服电机
120 TAS.580.0560G00PLC模块
PM825 3BSE010796R1 servo controller
BENTLY 3500/44M 176449-03 Vibration Monitor
BENTLY 3500/44-01-00 Output Module
| R46GENA-TS-NS-NV-00 | R43HEAA-R2-NS-VS-02 | R33GEN0-R2-NS-NV-00 |
| R46GENA-TS-NG-NV-00 | R24HENA-HS-LB-NV-02 | R43HEBA-R2-NS-VS-00 |
| R46GENA-TS-LS-NV-02 | SERVOSTAR-603-AS | IMDSO14 |
| R46GENA-T2-NS-NV-02 | R34JENT-TS-LA-NV-01 | R43HENA-TS-NF-NV-00 |
| R46GENA-R2-NS-NV-00 | R32GENC-HS-ND-NV-00 | S33HSNA-RNNM-02 |
| R46GENA-R2-NG-VS-00 | R46GSNA-HS-NS-NV-03 | S31GNAA-RNNM-00 |
| R46GENA-HS-NS-NV-00 | R33GENT-TS-NS-NV-00 | R43GENA-R2-NS-NV-00 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
