1.产 品 资 料 介 绍：
NIKON 4S065-552 驱动器模块
- 适配尼康 NSR 系列半导体光刻机，驱动载台、光路精密步进电机
- 高细分驱动芯片，微小步距输出，晶圆对位重复定位精度极高
- 内置 27 位编码器信号解析回路，实时闭环修正运动位置偏差
- 低纹波电流输出，电机运行无抖动，保障光刻成像稳定清晰
- 上电软启动电路，抑制浪涌电流，保护镜头与精密板卡元器件
- 多层金属屏蔽 PCB 结构，抵御腔体射频、激光电磁干扰
- 集成过流、过热、短路、超行程多重自动停机防护
- 洁净级低出气材质，适配高等级无尘晶圆生产车间
- 独立温控散热线路，长时间连续曝光工况温升可控
- 金手指直插式模块化设计，机柜内部拆装替换维护便捷
- 多路差分脉冲通讯接口，稳定接收主控运动指令信号
- 板载故障自检反馈通道，快速上传报错代码便于检修
- 加固焊点与基板结构，设备震动、平台移动不易虚焊脱焊
- 工业宽温元器件，腔体周边高低温环境性能无衰减漂移
- 原厂整机通电老化测试，同型号尼康光刻设备直接兼容替换NIKON 4S065-552 驱动器模块运动控制精准、抗干扰可靠，是半导体光刻机载台与光路驱动专用原装备件
NIKON 4S065-552 驱动器模块 产品英文
NIKON 4S065-552 Driver Module
Compatible with Nikon NSR series semiconductor lithography machine, driving stage and optical path precision stepper motor
High subdivision driver chip, tiny step output, extremely high precision in wafer alignment and repeated positioning
Built in 27 bit encoder signal analysis circuit, real-time closed-loop correction of motion position deviation
Low ripple current output, no shaking during motor operation, ensuring stable and clear lithography imaging
Power on soft start circuit, suppress surge current, protect lens and precision board components
Multi layer metal shielding PCB structure to resist cavity RF and laser electromagnetic interference
Integrated multiple automatic shutdown protection for overcurrent, overheating, short circuit, and overtravel
Clean grade low exhaust material, suitable for high-grade dust-free wafer production workshops
Independent temperature control heat dissipation circuit, controllable temperature rise under long-term continuous exposure conditions
Golden finger direct insertion modular design, convenient disassembly, replacement, and maintenance inside the cabinet
Multi channel differential pulse communication interface, stable reception of main control motion command signals
Onboard fault self check feedback channel, quickly upload error codes for easy maintenance
Strengthen the solder joints and substrate structure to prevent virtual soldering and detachment during equipment vibration and platform movement
Industrial wide temperature element device, with no attenuation drift in the high and low temperature environment around the cavity
Original factory whole machine power on aging test, compatible with Nikon lithography equipment of the same model for direct replacement
The NIKON 4S065-552 driver module has precise motion control, reliable anti-interference, and is a dedicated original spare part for semiconductor lithography airborne platforms and optical path drivers
NIKON 4S065-552 驱动器模块 产品展示
视频展示
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| 6ES5998-8MB22 | 531X116SHAAAG1 | 531X308PCSAEG3 |
| 6ES5998-8MA12 | 531X102CCHAEM1 | 740-689986-002 |
| 6ES5998-5SK11 | 26-147415-00 | 073-404369-00 |
| 6ES5998-4ET31 | 531X111PSHAWG2 | 710-652697-00 |
| 6ES5998-3ES52 | 531X111PSHASG1 | 92-005422-OX |
| 6ES5998-2UL24 | 531X111PSHAJG3 | 710-500098-00 |
| 6ES5998-2DB31 | 193X741ABG03 | 710-302183-00 |
| 6ES5998-1UD31 | 531X111PSHARG3 | 500-225578-000 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
