AMAT 0190-76273 加热器驱动器

AMAT 0190-76273 加热器驱动器 

1.产 品 资 料 介 绍：

# AMAT 0190-76273 加热器驱动器

AMAT 0190-76273 是半导体 PVD 镀膜设备专用灯式加热驱动模块，精准控温，保障晶圆薄膜工艺温度稳定。

1. 适配应用材料镀膜机台，匹配 0190-76273 加热回路

2. 高精度闭环温控，腔室温度波动极小

3. 大功率输出，稳定驱动红外加热灯管

4. 相位调压输出，加热功率连续无极调节

5. 内置过流、过压、过热、干烧多重防护

6. 软启动电路，避免开机冲击烧毁加热灯

7. 金属屏蔽壳体，隔绝腔体射频电磁干扰

8. 多路温度反馈采集，实时修正加热输出

9. 标准工业通讯接口，对接整机主控系统

10. 强弱电分层布线，降低信号与功率串扰

11. 透明防护端子盖，便于接线检修观察

12. 自带故障指示灯，异常代码快速识别

13. 宽温耐受结构，适配真空腔体高低温工况

14. 标准机柜安装孔位，拆装替换便捷快速

15. 出厂满载温控老化校验，输出参数统一

综上，AMAT 0190-76273 加热器驱动器控温精准、安全防护完善，是半导体薄膜沉积设备核心温控供电备件。

AMAT 0190-76273 加热器驱动器  产品英文

#AMAT 0190-76273 Heater Driver

AMAT 0190-76273 is a specialized lamp type heating and driving module for semiconductor PVD coating equipment, with precise temperature control to ensure stable wafer film process temperature.

1. Suitable for application material coating machine, matched with 0190-76273 heating circuit

2. High precision closed-loop temperature control, with minimal temperature fluctuations in the chamber

3. High power output, stable driving of infrared heating lamp tube

4. Phase regulated voltage output, continuous infinite adjustment of heating power

5. Built in multiple protections against overcurrent, overvoltage, overheating, and dry burning

6. Soft start circuit to avoid burning out the heating lamp due to startup shock

7. Metal shielding shell, isolating cavity RF electromagnetic interference

8. Multi channel temperature feedback acquisition, real-time correction of heating output

9. Standard industrial communication interface, connected to the main control system of the whole machine

10. Layered wiring of strong and weak electricity to reduce signal and power crosstalk

11. Transparent protective terminal cover, convenient for wiring maintenance and observation

12. Comes with a fault indicator light for quick identification of abnormal codes

13. Wide temperature tolerance structure, suitable for high and low temperature working conditions of vacuum chambers

14. Standard cabinet installation holes, easy and fast disassembly and replacement

15. Factory full load temperature control aging verification, with unified output parameters

In summary, the AMAT 0190-76273 heater driver has precise temperature control and complete safety protection, making it a core temperature control and power supply spare part for semiconductor thin film deposition equipment.

AMAT 0190-76273 加热器驱动器   产品展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218