1.产 品 资 料 介 绍：
MKS 683B-29016 节流控制阀 产品英文介绍
MKS 683B-29016 throttle control valve, vacuum exhaust regulating valve, with high process control accuracy.
1. Integrated control driver circuit, no need for external control module
2. PID closed-loop regulation, fast pressure response, small overshoot
3. Supports two working modes: pressure and baffle position
4. Digital communication transmission, resistant to on-site electromagnetic interference
5. Linear valve characteristics, smooth and stable pressure regulation
6. Built in dual alarm points, with the ability to set up safety interlocks
7. Support remote parameter reading for easy device diagnosis
8. Flange standard interface, convenient disassembly and assembly of vacuum pipelines
9. The valve body has good sealing performance and is suitable for vacuum process chambers
10. Free tuning of loop parameters to adapt to different systems
11. Status indicator light, visually viewing the working status of the valve
12. Compact structure, saving installation space inside the equipment
13. Adapt to the continuous operation conditions of semiconductor vacuum technology
14. The compatibility of spare parts replacement is good, and there is no need to modify the pipeline
15. Support automated networking and access to device control systems
MKS 683B-29016 throttle control valve, commonly used for pressure regulation and control in semiconductor vacuum chambers.
MKS 683B-29016 节流控制阀 产品展示
视频展示
其他产品
07AC91F GJR5252300R3101 模拟量输入输出模块
GJR5252300R3101 07AC91H 模拟输入单元模块
EATON MPB1-TP 数字输入模块
CSA464AE HIEE400106R0001 processor module
DS200TCTGG1AFF gas turbine electric card
DT602 GJR2911200R1 Switch module
| PMB31B-10200-01 | PHBAIN1200S100 | M22NSLB-JDS-NS-02 |
| PMB31B-10200-00 | IEPDP01 | UA 380a-E |
| PMB31B-10116-03 | IEPAS01 | P21NRXS-LNS-NS-03 |
| PMB31B-10116-02 | NKTU015 | M21NRXE-LNF-NS-00 |
| PMB31B-10116-01 | AMAT 0100-00429 | N33HCHK-LNK-NS-00 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
