1.产 品 资 料 介 绍：
TEL 3D81-000099-V1 控制器模块 产品英文介绍
TEL 3D81-000099-V1 controller module, semiconductor equipment main control card, stable process control.
1. High speed logical operation, executing the entire process flow of the equipment
2. Multiple IO channels, collecting sensor feedback signals
3. Optoelectronic isolation design to resist electromagnetic interference from cabinets
4. Multiple sets of communication interfaces, connecting sub modules and upper level systems
5. Multiple hardware protections against overvoltage and overcurrent to protect onboard devices
6. Wide temperature components to adapt to temperature changes in equipment cabinets
7. Onboard status indicator light, convenient for troubleshooting equipment failures
8. Power off to save process parameters, power on to restore operation directly
9. Standard slot structure, easy disassembly and replacement of cabinets
10. Reinforced plate body, resistant to production line vibration and less prone to poor contact
11. Built in filtering circuit to reduce signal false triggering
12. Factory firmware adaptation, direct replacement of spare parts without changing the program
13. Low power design, low temperature rise during long-term operation
14. Interlockable valves, robotic arms, and flow control devices
15. Support continuous operation of 7 × 24-hour wafer production line
TEL 3D81-000099-V1 controller module, commonly used for logic control of etching and thin-film semiconductor equipment.
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
