Hirata AR-Wn150CL-3-S-M900-2-EB18A-AW 机器人组件

Hirata AR-Wn150CL-3-S-M900-2-EB18A-AW 机器人组件 

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Hirata AR-Wn150CL-3-S-M900-2-EB18A-AW 机器人组件 产品英文介绍

#Hirata AR-Wn150CL-3-S-M900-2-EB18A-AW Robot Component Product Features

Hirata AR-Wn150CL-3-S-M900-2-EB18A-AW is a semiconductor vacuum wafer handling robot component, with the following core features:

1. Adapt to vacuum chamber environment for automatic wafer handling and transportation

2. Direct drive motor structure, low vibration, smooth operation

3. No battery absolute value encoder, no need to backup battery

4. Built in collision detection function to reduce the risk of arm damage

5. Steel bundle transmission structure to suppress lateral offset drift

6. High repeatability accuracy to meet semiconductor process requirements

7. Optimization of motion algorithm to shorten wafer handling cycle time

8. Reduce magnetic fluid sealing to avoid splashing of the medium inside the cavity

9. Strong arm rigidity and minimal deformation during high-speed movement

10. Support multi axis linkage, collaborative actions of rotation, extension, and lifting

11. Can be connected to the upper controller to achieve automated process control

12. Clean level design, suitable for dust-free wafer handling scenarios

13. Compact structure, suitable for installation space in narrow chambers of equipment

14. Support fault alarm output for easy status monitoring

15. Modular components, easy disassembly, maintenance and repair

Hirata AR‑Wn150CL‑3‑S‑M900‑2‑EB18A‑AW  Robot components, high-precision and low vibration, reliably complete semiconductor vacuum environment wafer handling operations

Hirata AR-Wn150CL-3-S-M900-2-EB18A-AW 机器人组件 产品展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218