Edwards STP-XA3203CV 涡轮分子泵

Edwards STP-XA3203CV 涡轮分子泵  

1.产 品 资 料 介 绍：

Edwards STP‑XA3203CV 半导体磁悬浮涡轮分子泵，适配重腐蚀等离子体工艺，特点如下：

1. 五轴全磁悬浮轴承，转子无接触，无油脂污染风险
2. 搭载 TMS 温控管理系统，抑制工艺副产物凝结沉积
3. 大抽速输出，对氢气、氩气处理能力表现突出
4. 耐受大工艺流量，适配刻蚀多变排气负载工况
5. 内置自适应减振算法，整机振动水平极低
6. 特殊防腐泵体配置，兼容卤素类腐蚀性气体
7. 水冷散热结构，长时间重载运行温度可控
8. 自带氮气吹扫接口，保护轴承组件不受工艺气体侵蚀
9. 可多姿态安装，不受设备安装角度限制
10. 板载驱动控制单元，减少外部控制器布线
11. 实时状态监测，可记录完整运行与故障数据
12. 工业通讯接口，可对接产线主控实现远程管控
13. 具备过流、过热、转子异常多重联锁保护
14. 满足 SEMI 行业标准，适配 300mm 晶圆设备腔体
15. 无磨损轴承设计，降低现场维护频次

Edwards STP-XA3203CV 涡轮分子泵  产品英文介绍

Edwards STP-XA3203CV semiconductor magnetic levitation turbo molecular pump, suitable for weight corrosion plasma process, with the following characteristics:

1. Five axis fully magnetic levitation bearing, rotor non-contact, no risk of grease contamination

2. Equipped with TMS temperature control management system to suppress the condensation and deposition of process by-products

3. High pumping speed output, outstanding performance in processing hydrogen and argon gas

4. Tolerate high process flow and adapt to various exhaust load conditions during etching

5. Built in adaptive damping algorithm, the overall vibration level of the machine is extremely low

6. Special anti-corrosion pump body configuration, compatible with halogen corrosive gases

7. Water cooled cooling structure, temperature controllable during long-term heavy load operation

8. Comes with a nitrogen purge interface to protect bearing components from process gas erosion

9. Can be installed in multiple positions, not limited by the installation angle of the device

10. Onboard drive control unit, reducing external controller wiring

11. Real time status monitoring, capable of recording complete operation and fault data

12. Industrial communication interface, which can be connected to the main control of the production line to achieve remote control

13. Equipped with multiple interlocking protections for overcurrent, overheating, and rotor abnormalities

14. Meet SEMI industry standards and adapt to 300mm wafer equipment cavities

15. Wear free bearing design reduces on-site maintenance frequency

Edwards STP-XA3203CV 涡轮分子泵 产品展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218