1.产 品 资 料 介 绍：
AMAT 0190‑54045 氦气低温压缩机，适配半导体低温冷泵循环供气，特点如下：
- 专为高纯氦气循环压缩，保障冷头系统稳定制冷
- 无油压缩腔结构，避免油质混入氦气回路
- 压力闭环控制，输出供气压力持续稳定
- 内置高效水冷散热，长时间连续运行控温
- 集成油气分离与过滤组件，维持氦气高洁净度
- 自适应负载调节，跟随冷泵工况动态调节输出
- 管路采用特种密封，降低氦气介质泄漏损耗
- 自带压力、温度传感器，实时采集运行参数
- 故障事件存储记录，便于产线故障排查溯源
- 工业通讯接口，支持与主机系统远程交互
- 具备超压、超温、低压多重安全联锁保护
- 内置氦气缓冲回路，减小管路压力波动
- 机架式结构，适配设备机柜内部安装布局
- 符合 SEMI 半导体工厂安全与洁净规范
- 过滤器、密封件模块化，现场维护更换便捷
AMAT 0190‑54045 氦气低温压缩机，供气稳定低泄漏，为半导体低温真空冷泵提供可靠氦气循环动力。
AMAT 0190-54045 氦气低温压缩机 产品英文介绍
AMAT 0190-54045 helium low-temperature compressor, suitable for semiconductor low-temperature cold pump circulation gas supply, with the following characteristics:
1. Specially designed for high-purity helium gas circulation compression, ensuring stable refrigeration of the cold head system
2. Non hydraulic compression chamber structure to prevent oil from mixing into the helium circuit
3. Pressure closed-loop control, continuous and stable output gas supply pressure
4. Built in high-efficiency water-cooled heat dissipation, temperature control for long-term continuous operation
5. Integrate oil and gas separation and filtration components to maintain high cleanliness of helium gas
6. Adaptive load regulation, dynamically adjusting output according to the working conditions of the cold pump
7. The pipeline adopts special sealing to reduce the leakage loss of helium medium
8. Equipped with pressure and temperature sensors, real-time collection of operating parameters
9. Fault event storage records for easy troubleshooting and traceability of production line faults
10. Industrial communication interface, supporting remote interaction with host systems
11. Equipped with multiple safety interlock protections for overpressure, overtemperature, and low pressure
12. Built in helium buffer circuit to reduce pressure fluctuations in pipelines
13. Rack mounted structure, suitable for internal installation layout of equipment cabinets
14. Complies with SEMI semiconductor factory safety and cleanliness standards
15. Modular filters and seals, convenient on-site maintenance and replacement
AMAT 0190-54045 helium low-temperature compressor provides stable gas supply and low leakage, providing reliable helium circulation power for semiconductor low-temperature vacuum pumps.
视频展示
其他产品
Schneider 140CPU11303 CPU模块
Schneider 140CRA93100 RIO远程适配器模块
SCHNEIDER 140CRA93200 输入/输出模块
IC698CRE040-HN gas turbine electric card
KUC321AE HIEE300698R0001 Control module
PPC905AE101 3BHE014070R0101 3BHE014071P201 module
| PMA43R-10100-00 | IEPAF02 | PFTL101AE-1.0KN 3BSE004212R1 1.0KN |
| PMA43Q-Y0100-02 | AMAT 0100-90554 | PFTL101B-10KN 3BSE004197R1 |
| PMA43Q-10100-00 | NKTU116 | PFTL101AER-0.5KN 3BSE023010R1 |
| PMA43Q-00100-00 | 07AA63 | PFTL101B 50KN |
| PMA43P-11100-00 | ICSO16N1 | PFTL-101B 5KN 3BSE00418SR1 |
| PMA43P-10100-00 | AMAT 0100-09131 | PFTL101B-2.0KN 3BSE004185R1 2.0KN |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
