1.产 品 资 料 介 绍：
Edwards PT50-0Z-006 涡轮分子泵 产品英文介绍
#Edwards PT50-0Z-006 Turbomolecular Pump Product Features
Edwards PT50-0Z-006 small turbo molecular pump, adapted for high vacuum acquisition in equipment chambers, features the following:
1. Integrated built-in driver, no need for external independent controller, reducing the number of accessories
2. Oil free turbine structure, no oil evaporation, ensuring a clean vacuum environment in the chamber
3. Small and lightweight pump body, suitable for installation in narrow equipment chamber spaces
4. Optimize the blade design of the rotor to have good pumping ability for light gases
5. Fast start stop speed, reducing the waiting time for the chamber to reach the target vacuum
6. Built in gas blowing interface to block process particles from entering the bearing area
7. Air cooling solution, no need for external water cooling pipelines, simple deployment
8. Low vibration output, reducing interference with precision components inside the cavity
9. Supports multi posture installation and can flexibly adapt to different installation angles of devices
10. Onboard status monitoring, real-time feedback of speed and temperature operating parameters
11. Digital communication interface, connected to the main control of the whole machine to achieve remote control
12. Multi level hardware protection interlock for abnormal speed, overheating, and overload
13. Local storage of fault information facilitates production line maintenance and problem tracing
14. Compliant with SEMI cleanliness standards and suitable for semiconductor assisted vacuum conditions
15. Overall modularization, easy disassembly and replacement, reducing equipment downtime
Edwards PT50-0Z-006 Turbomolecular Pump, compact and easy to integrate, oil-free and clean, commonly used in high vacuum scenarios such as load locks and analysis chambers
Edwards PT50-0Z-006 涡轮分子泵 产品展示
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| PMA42N-00100-00 | AMAT 0100-01135 | PFRL101D |
| PMA42M-10100-00 | AMAT 0100-09041 | PFTL 101AE-0.5 |
| PMA42M-01100-00 | Amat 0100-03499 | PFTL 101BER-20.0KN |
| PMA42M-00100-00 | Amat 0100-35060 | PFTL 201DE-100.0KN |
| PMA24K-1050B-02 | Amat 0100-09320 | PFTL 201CE-10.0KN |
| PMA24D-10100-00 | AMAT 0100-09081 | PFTL 101AER-2.0KN |
| PMA24D-00100-00 | AMAT 0100-20091 | PFTL 301E-0.2 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
