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Edwards PT41-SZ-200 涡轮分子泵

发布时间:2026-08-26人气:
  • Edwards PT41-SZ-200 涡轮分子泵
  • Edwards PT41-SZ-200 涡轮分子泵
  • Edwards PT41-SZ-200 涡轮分子泵

Edwards PT41-SZ-200 涡轮分子泵 

1.产 品 资 料 介 绍:

# Edwards PT41‑SZ‑200 涡轮分子泵产品特点
Edwards PT41‑SZ‑200 小型涡轮分子泵,用于设备腔体获取洁净高真空,特点如下:
1. 集成驱动单元,无需外置控制器,简化系统布线
2. 无油涡轮结构,不会产生油污污染真空腔体
3. 体积小巧,适合狭小设备腔体安装空间
4. 转子叶片优化,轻气体抽气效果良好
5. 开机加速快,快速达到目标真空度
6. 配备吹扫气接口,阻挡粉尘进入轴承部位
7. 风冷散热,不用外接水冷管路,部署简单
8. 运行振动低,降低对腔体精密部件影响
9. 支持多角度安装,适配设备不同装配方位
10. 实时监测转速、温度等核心运行参数
11. 通讯接口支持整机主控远程读取状态
12. 转速异常、超温、过载多重保护联锁
13. 本地存储报警记录,便于故障排查
14. 满足 SEMI 规范,适配半导体辅助真空工位
15. 模块化结构,拆装替换方便,减少停机
Edwards PT41‑SZ‑200 涡轮分子泵,紧凑集成,多用于负载锁、分析类腔体高真空应用。

Edwards PT41-SZ-200 涡轮分子泵 产品英文介绍

#Edwards PT41-SZ-200 Turbomolecular Pump Product Features

Edwards PT41-SZ-200 small turbo molecular pump is used to obtain clean high vacuum in equipment chambers, with the following characteristics:

1. Integrated driver unit, no need for external controller, simplifies system wiring

2. Oil free turbine structure, which will not produce oil pollution to the vacuum chamber

3. Compact size, suitable for installation space in narrow equipment cavities

4. Optimization of rotor blades, good light gas extraction effect

5. Fast startup acceleration, quickly reaching the target vacuum level

6. Equipped with a blowing air interface to prevent dust from entering the bearing area

7. Air cooled heat dissipation, no need for external water cooling pipelines, simple deployment

8. Low operating vibration reduces the impact on precision components of the cavity

9. Support multi angle installation and adapt to different assembly orientations of devices

10. Real time monitoring of core operating parameters such as speed and temperature

11. The communication interface supports remote reading of the status by the main control of the entire machine

12. Multiple protection interlocks for abnormal speed, overheating, and overload

13. Local storage of alarm records for easy troubleshooting

14. Meet SEMI specifications and adapt to semiconductor assisted vacuum stations

15. Modular structure, easy disassembly and replacement, reducing downtime

Edwards PT41-SZ-200 turbomolecular pump, compact and integrated, is commonly used for high vacuum applications in load locks and analytical chambers.

Edwards PT41-SZ-200 涡轮分子泵 产品展示

PT41-SZ-200 (2).jpg

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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