1.产 品 资 料 介 绍:
Edwards PT41-SZ-200 涡轮分子泵 产品英文介绍
#Edwards PT41-SZ-200 Turbomolecular Pump Product Features
Edwards PT41-SZ-200 small turbo molecular pump is used to obtain clean high vacuum in equipment chambers, with the following characteristics:
1. Integrated driver unit, no need for external controller, simplifies system wiring
2. Oil free turbine structure, which will not produce oil pollution to the vacuum chamber
3. Compact size, suitable for installation space in narrow equipment cavities
4. Optimization of rotor blades, good light gas extraction effect
5. Fast startup acceleration, quickly reaching the target vacuum level
6. Equipped with a blowing air interface to prevent dust from entering the bearing area
7. Air cooled heat dissipation, no need for external water cooling pipelines, simple deployment
8. Low operating vibration reduces the impact on precision components of the cavity
9. Support multi angle installation and adapt to different assembly orientations of devices
10. Real time monitoring of core operating parameters such as speed and temperature
11. The communication interface supports remote reading of the status by the main control of the entire machine
12. Multiple protection interlocks for abnormal speed, overheating, and overload
13. Local storage of alarm records for easy troubleshooting
14. Meet SEMI specifications and adapt to semiconductor assisted vacuum stations
15. Modular structure, easy disassembly and replacement, reducing downtime
Edwards PT41-SZ-200 turbomolecular pump, compact and integrated, is commonly used for high vacuum applications in load locks and analytical chambers.
Edwards PT41-SZ-200 涡轮分子泵 产品展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218




