Edwards STP-iXR1606C 涡轮分子泵

Edwards  STP-iXR1606C 涡轮分子泵 

1.产 品 资 料 介 绍：

Edwards  STP-iXR1606C 涡轮分子泵 产品英文介绍

#Edwards STP-iXR1606C Turbomolecular Pump Product Features

Edwards STP-iXR1606C magnetic levitation turbo molecular pump is used for semiconductor high flow and high vacuum conditions, with the following characteristics:

1. Five axis magnetic levitation bearings, rotor non-contact, no grease contamination

2. Integrated pump body drive, no need for external controller, simplified wiring

3. High pumping speed performance, capable of withstanding high intake pressure and process gas volume

4. Equipped with a self balancing rotor, the whole machine has low vibration and does not interfere with the components inside the cavity

5. Water cooling and heat dissipation, suitable for long-term continuous heavy load operation

6. Set up a blowing air interface to block dust from entering the bearing area

7. Support multi posture installation and adapt to different installation angles of devices

8. Power consumption optimization, excellent energy consumption performance under high flow conditions

9. The shell has a high level of protection and can withstand the dust environment in the workshop

10. Real time collection of operating data such as speed, temperature, and load

11. Industrial communication docking with the main control of the entire machine to achieve remote monitoring

12. Save operation logs and alarm information for easy troubleshooting

13. Multiple safety protections against overheating, overload, and abnormal speed

14. The bearings have no mechanical wear, reducing the frequency of on-site maintenance

15. Standard flange interface, quick disassembly and replacement, reducing downtime

Edwards STP-iXR1606C turbo molecular pump, high flow integrated magnetic levitation, suitable for high vacuum scenarios in coating and semiconductor processes

Edwards  STP-iXR1606C 涡轮分子泵 产品展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218