1.产 品 资 料 介 绍：
Edwards YT66-C6-001 涡轮分子泵 产品英文介绍
The Edwards YT66-C6-001 turbomolecular pump is a corrosion-resistant magnetic levitation turbopump used for high vacuum pumping in semiconductor process chambers. The core product features are as follows:
1. Magnetic levitation bearing structure, no mechanical contact wear
2. Fully dry oil-free operation, providing a clean vacuum environment
3. Internal anti-corrosion treatment, compatible with corrosive process gases
4. Integrated drag and ｄｒｏｐ level to enhance the stress tolerance of the front stage
5. Stable pumping speed performance, quickly establishing high vacuum
6. Low operating vibration, suitable for precision process chambers
7. Real time monitoring of operating parameters such as speed and temperature
8. Multiple fault protection against overheating, overload, and overpressure
9. Support bus communication and interface with the main control system of the device
10. High rotor strength, supporting long-term continuous production
11. Excellent compression ratio of light gas and good hydrogen extraction effect
12. Equipped with energy-saving standby mode to reduce operating power consumption
13. Modular structure, convenient on-site disassembly and maintenance
14. Standard flange interface, convenient vacuum pipeline docking
15. Can be paired with multiple front-end dry pumps and adapted to various vacuum systems
The Edwards YT66-C6-001 turbomolecular pump has high reliability and is commonly used in semiconductor vacuum conditions with corrosive gases such as etching and coating.
Edwards YT66-C6-001 涡轮分子泵 产品展示
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| PC843-001-A |  6SC6100-0NA01 | HESG447043R0001 70VV01A |
| PC842-XYZ-T | 6SC6100-0GB12 | HESG446624R0001 XT377E |
| PC842-XYZ-N | 6SC6500-0NA04 | NTHS03 |
| PC842-XYZ-F | Gespac GESSBS-4 GESSBS-6A GESSIO-1E | NTRO02 |
| PC842-XYZ-A | Gespac INC-1 | NKHS03-15 |
The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
