Orion Machinery PAP03A-D-CE-SP 精密空气处理器
1.产 品 资 料 介 绍：
Orion Machinery PAP03A-D-CE-SP 精密空气处理器 产品英文介绍
Orion Machinery PAP03A-D-CE-SP is a precision air processor designed by Haoliwang for dehumidification. It utilizes a heat pump for balanced temperature control and dehumidification, producing low dew point clean process air.
Application areas
1. Temperature and humidity control of the internal environment of the semiconductor lithography machine cabinet
2. Wafer testing equipment chamber air supply dehumidification treatment
3. Clean and dry gas supply for optical measuring instruments
4. Air conditioning for compound semiconductor process equipment
5. Low dew point environmental protection for chip packaging equipment
6. Pre process air drying treatment for vacuum coating
7. Laboratory precision optical platform environment adjustment
8. Air supply and dehumidification for flat panel display process equipment
9. Dry air supply for laser precision machining equipment
10. Temperature and humidity control of electronic component testing cabinet
Product parameters
1. Heat pump balance control, no electric heating, temperature control accuracy ± 0.2 ℃
2. Three phase AC 200V ± 10%, 50/60Hz industrial power supply
3. Rated processing air volume of 3-5m ³/min, capable of outputting low dew point dry air
4. Built in fault self diagnosis, supports alarm signal output, and can be connected to the upper system
5. Equipped with a filtering unit to reduce particulate matter and adapt to semiconductor clean working conditions
In summary, the Orion Machinery PAP03A-D-CE-SP temperature control and dehumidification are stable, and it outputs clean and low humidity process air, which is a key unit for environmental regulation of semiconductor optical equipment.
Orion Machinery PAP03A-D-CE-SP 精密空气处理器 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
