MKS 0920-00057 等离子电源模块

MKS 0920-00057 等离子电源模块 

1.产 品 资 料 介 绍：

MKS 0920-00057 等离子电源模块 产品英文介绍

MKS 0920-00057 is equipped with an RF plasma power module for Astron's remote plasma source, providing RF excitation energy to the plasma chamber for semiconductor chamber cleaning processes.

Application areas

1. Dry cleaning of CVD chamber for semiconductor equipment

2. Removal and treatment of sediment in the etching machine chamber

3. Plasma ashing and stripping process for photoresist

4. Compound semiconductor wafer processing

5. Maintenance and cleaning of the chamber of thin film deposition equipment

6. Surface modification processing of low-k dielectric materials

7. Advanced chip packaging cavity purification operation

8. Cleaning process of photovoltaic thin film equipment chamber

9. Plasma dissociation treatment of process exhaust gas

10. Free radical excitation in nitrogen oxidation process

Product Parameters

1. Pulse RF output mode, compatible with NF3 process gas, maximum flow rate of 6SLM

2. Closed loop power control, stable output power, and good process repeatability

3. Water cooling and heat dissipation structure, supporting long-term continuous production and operation of equipment

4. Equipped with digital bus and analog I/O, interface with semiconductor equipment master control

5. Built in overcurrent, over temperature, and reflection power over limit fault protection

Overall, the MKS 0920-00057 power module has stable output and is compatible with remote plasma sources, making it the core power supply unit for semiconductor cavity cleaning processes.

MKS 0920-00057 等离子电源模块  产品展示

视频展示

其他产品

 CI854A 3BSE030221R1 可编程逻辑控制器
 CI855K013BSE018106R1 通讯设备模块
 CI867 3BSE043661R1通信接口模块

英文产品

8521-LC-MT Bus structure module
BENTLY 9200-01-01-10-00 Sensor module
AI3281 AI3281-A-V001 pulse output card

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218