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Glassman EX040P025 恒压电源模块

发布时间:2026-09-01人气:
  • Glassman EX040P025 恒压电源模块
  • Glassman EX040P025 恒压电源模块
  • Glassman EX040P025 恒压电源模块

Glassman EX040P025 恒压电源模块 

1.产 品 资 料 介 绍:

Glassman EX040P025 是半导体设备高压恒压电源模块,用于真空工艺静电偏压供给,具备恒压恒流自动切换能力,输出纹波低。
产品特点:
1. 高精度闭环稳压,输出纹波小,工艺输出一致性高
2. 恒压‑恒流自动交叉切换,抑制电弧,保护腔体器件
3. 支持本地旋钮调节与外部模拟信号远程程控
4. 集成过压、过流、过温、拉弧检测,故障告警输出
5. 机架式模块化结构,适配半导体机柜安装维护
产品参数:
1. 额定输出电压:40kV
2. 额定输出电流:25mA
3. 输入电源:220‑240VAC 50/60Hz 单相
4. 调节方式:本地电位器、外部 0‑10V 模拟控制
5. 冷却方式:风冷
应用领域:
1. 半导体离子注入设备高压偏压供电
2. 真空镀膜设备高压源单元
3. 等离子体工艺腔体静电偏置供给
4. 材料表面处理高压工艺设备
5. 半导体工艺设备备件替换
Glassman EX040P025 可为真空工艺设备提供稳定可控的高压直流功率输出。

Glassman EX040P025 恒压电源模块 产品英文介绍

Glassman EX040P025 is a high-voltage and constant voltage power supply module for semiconductor equipment, used for electrostatic bias supply in vacuum processes. It has the ability to automatically switch between constant voltage and constant current, with low output ripple.

Product Features:

1. High precision closed-loop voltage regulation, small output ripple, and high consistency of process output

2. Constant voltage constant current automatic cross switching, arc suppression, and protection of cavity components

3. Support local knob adjustment and remote control of external analog signals

4. Integrated overvoltage, overcurrent, overtemperature, and arcing detection, with fault alarm output

5. Rack mounted modular structure, suitable for installation and maintenance of semiconductor cabinets

Product Parameters:

1. Rated output voltage: 40kV

2. Rated output current: 25mA

3. Input power supply: 220-240VAC 50/60Hz single-phase

4. Adjustment method: local potentiometer, external 0-10V analog control

5. Cooling method: air-cooled

Application fields:

1. High voltage bias power supply for semiconductor ion implantation equipment

2. High pressure source unit of vacuum coating equipment

3. Electrostatic bias supply for plasma process chamber

4. High pressure process equipment for material surface treatment

5. Replacement of spare parts for semiconductor process equipment

Glassman EX040P025 can provide stable and controllable high-voltage DC power output for vacuum process equipment.

Glassman EX040P025 恒压电源模块 产品展示

EX040P025.webp.jpg

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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