1.产 品 资 料 介 绍：
AMAT 0090-76133 单板计算机模块 产品英文介绍
AMAT 0090-76133 is an old semiconductor process machine VME bus single board computer module (Synergy V452). As an embedded main control unit of the machine, it realizes process logic operation, data processing, and overall communication, and is compatible with Centura and Endura series equipment.
Product Features:
1. Industrial grade board components, three proof coating, anti plasma workshop electromagnetic interference
2. VME slot installation, directly connected to the machine backplane, easy to ｒｅｐｌａｃｅ and disassemble
3. Built in watchdog mechanism, automatic alarm for abnormalities, ensuring the safe operation of the machine
4. Supports SECS/GEM protocol and can be connected to the upper computer of the production line to complete formula interaction
5. Real time processing of chamber sensor data to achieve closed-loop control of etching and deposition processes
Product Parameters:
1. Processor: Motorola 68040
2. Bus: VMEbus
3. Memory: 16MB (expandable to 32MB)
4. Communication interface: Ethernet, RS-232
5. Working temperature: 5-45 ℃
Application fields:
1. AMAT Centura etching equipment main control operation unit
2. Endura PVD thin film deposition machine system control
3. Storage of semiconductor process formulas and chamber logic processing
4. Signal acquisition and analysis of vacuum equipment sensors
5. Replacement of old semiconductor equipment spare parts with application materials
AMAT 0090-76133 can provide stable and reliable embedded main control computing capabilities for semiconductor legacy process machines.
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
