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AMAT 0010-57289 晶圆旋转转移机器人

发布时间:2026-09-02人气:
  • AMAT 0010-57289 晶圆旋转转移机器人
  • AMAT 0010-57289 晶圆旋转转移机器人
  • AMAT 0010-57289 晶圆旋转转移机器人

AMAT 0010-57289 晶圆旋转转移机器人 

1.产 品 资 料 介 绍:

AMAT 0010‑57289 是应用材料 300mm 晶圆旋转转移机器人,为半导体设备内部晶圆传输核心机械手备件。
产品特点:
1. 专为 300mm 晶圆旋转转运设计,原厂整机匹配度高
2. 洁净臂体结构,产尘量低,适配半导体洁净腔室环境
3. 伺服闭环驱动,运行平稳,降低晶圆碎片与刮伤风险
4. 集成专用末端执行器,可快速完成取片、旋转、送片动作
5. 高连续运行稳定性,满足半导体设备长时间量产工况
产品参数:
1. 型号:0010‑57289
2. 适用晶圆:300mm
3. 配套末端执行器件号:0042‑13780
4. 设备类型:旋转转移机械手组件
5. 适配设备:AMAT 系列半导体工艺设备
应用领域:
1.AMAT 工艺设备内部 300mm 晶圆旋转搬运
2. 半导体腔体之间晶圆交接与工位转换
3. 半导体生产设备故障机械手维修替换
4. 二手半导体设备拆机翻新装配
5. 半导体工厂备件库存储备
该 0010‑57289 旋转转移机器人保障 300mm 晶圆安全转运,是应用材料工艺设备不可或缺的传输部件

AMAT 0010-57289 晶圆旋转转移机器人 产品英文介绍

AMAT 0010-57289 is a 300mm wafer rotation transfer robot for application materials, which is a spare part for the core mechanical arm of wafer transfer inside semiconductor equipment.

Product Features:

1. Specially designed for 300mm wafer rotation and transfer, with high compatibility with the original factory equipment

2. Clean arm structure, low dust production, suitable for semiconductor clean chamber environment

3. Servo closed-loop drive ensures smooth operation and reduces the risk of wafer fragments and scratches

4. Integrated specialized end effectors can quickly complete the actions of picking up, rotating, and feeding pieces

5. High continuous operation stability, meeting the long-term production conditions of semiconductor equipment

Product Parameters:

1. Model: 0010-57289

2. Applicable wafer: 300mm

3. Supporting end effector number: 0042-13780

4. Equipment type: Rotating transfer robotic arm component

5. Compatible equipment: AMAT series semiconductor process equipment

Application fields:

1. AMAT process equipment internal 300mm wafer rotation and handling

2. Wafer handover and workstation conversion between semiconductor cavities

3. Maintenance and replacement of robotic arms for semiconductor production equipment malfunctions

4. Dismantling, refurbishing, and assembling second-hand semiconductor equipment

5. Spare parts inventory reserve in semiconductor factories

The 0010-57289 rotary transfer robot ensures the safe transfer of 300mm wafers and is an indispensable transport component for application material process equipment

AMAT 0010-57289 晶圆旋转转移机器人 产品展示

0010-57289.webp.jpg

视频展示


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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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