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Edwards A732-01-983 干式涡旋真空泵

发布时间:2026-09-02人气:
  • Edwards A732-01-983 干式涡旋真空泵
  • Edwards A732-01-983 干式涡旋真空泵
  • Edwards A732-01-983 干式涡旋真空泵

Edwards A732-01-983 干式涡旋真空泵 

1.产 品 资 料 介 绍:

Edwards A732‑01‑983 是爱德华无油干式涡旋真空泵,多用于半导体设备作为前级真空获取部件。
产品特点:
1. 完全干式无油设计,无返油污染风险,保障腔体洁净度
2. 涡旋无接触运转,振动小、运行噪音低
3. 内置气镇功能,可处理部分可凝性工艺蒸汽
4. 模块化结构,密封件拆装便捷,维护周期长
5. 工业整机耐用,适配半导体产线连续长时间运行
产品参数:
1. 型号:A732‑01‑983
2. 泵类型:干式涡旋真空泵
3. 接口规格:NW25 进气、NW25 排气
4. 供电:单相 100‑240V 50/60Hz
5. 冷却方式:风冷
应用领域:
1. 半导体工艺设备前级真空抽气
2. 真空腔体粗抽、传输腔真空建立
3. 镀膜、刻蚀设备配套真空机组
4. 旧设备真空泵故障备件替换
5. 半导体工厂真空备件库存储备
该 A732‑01‑983 干式涡旋泵依靠洁净抽气性能,是半导体产线常用粗真空核心设备

Edwards A732-01-983 干式涡旋真空泵 产品英文介绍

Edwards A732-01-983 is an oil-free dry vortex vacuum pump commonly used in semiconductor equipment as a front-end vacuum acquisition component.

Product Features:

1. Fully dry oil-free design, no risk of oil return pollution, ensuring the cleanliness of the chamber

2. Vortex non-contact operation, low vibration, and low operating noise

3. Built in gas ballast function, capable of processing some condensable process steam

4. Modular structure, easy disassembly and assembly of seals, long maintenance cycle

5. The industrial machine is durable and suitable for continuous long-term operation of semiconductor production lines

Product Parameters:

1. Model: A732-01-983

2. Pump type: Dry vortex vacuum pump

3. Interface specifications: NW25 intake, NW25 exhaust

4. Power supply: single-phase 100-240V 50/60Hz

5. Cooling method: air-cooled

Application fields:

1. Pre stage vacuum pumping of semiconductor process equipment

2. Vacuum chamber rough pumping and transmission chamber vacuum establishment

3. Coating and etching equipment are equipped with vacuum units

4. Replacement of faulty spare parts for old equipment vacuum pump

5. Vacuum spare parts inventory reserve in semiconductor factories

The A732-01-983 dry vortex pump relies on clean pumping performance and is a commonly used coarse vacuum core equipment in semiconductor production lines

Edwards A732-01-983 干式涡旋真空泵 产品展示

A732-01-983.webp.jpg

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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