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Sinfonia Technology SCE92100127 双臂晶圆搬运机器人

发布时间:2026-09-02人气:
  • Sinfonia Technology SCE92100127 双臂晶圆搬运机器人
  • Sinfonia Technology SCE92100127 双臂晶圆搬运机器人
  • Sinfonia Technology SCE92100127 双臂晶圆搬运机器人

Sinfonia Technology SCE92100127 双臂晶圆搬运机器人 

1.产 品 资 料 介 绍:

Sinfonia Technology SCE92100127 是日本新芬尼亚双臂晶圆搬运机器人,属于半导体 EFEM 单元核心传输机械手。
产品特点:
1. 双臂独立作业,可交替取放晶圆,传输效率高
2. 洁净级机械臂设计,低颗粒产生,适配 Class1 洁净环境
3. 伺服闭环控制,重复定位精度高,减少晶圆碎片刮伤
4. 紧凑机身结构,节省 EFEM 设备内部安装空间
5. 原厂耐用结构,支持半导体产线 7×24 小时连续作业
产品参数:
1. 型号:SCE92100127
2. 设备类型:双臂大气晶圆搬运机器人
3. 适配晶圆:300mm
4. 工作环境:大气洁净腔室
5. 配套单元:半导体 EFEM 设备
应用领域:
1. 半导体 EFEM 单元内部晶圆自动搬运
2.FOUP 晶圆盒与工艺工位之间晶圆转接
3. 刻蚀、薄膜设备前端晶圆上下料传输
4. 半导体设备故障机械手备件替换维修
5. 二手半导体设备翻新装配备件使用
该 SCE92100127 双臂搬运机器人是 300mm 晶圆前端设备的关键传输部件,保障晶圆高效安全转运

Sinfonia Technology SCE92100127 双臂晶圆搬运机器人 产品英文介绍

Sinfonia Technology SCE92100127 is a Japanese New Finnia dual arm wafer handling robot, belonging to the semiconductor EFEM unit core transfer manipulator.

Product Features:

1. Dual arm independent operation, capable of alternately picking up and placing wafers, with high transmission efficiency

2. Clean grade robotic arm design, low particle generation, suitable for Class 1 clean environment

3. Servo closed-loop control, high repeat positioning accuracy, reduces wafer fragment scratches

4. Compact body structure, saving installation space inside EFEM equipment

5. Durable original structure, supporting 7 × 24-hour continuous operation of semiconductor production lines

Product Parameters:

1. Model: SCE92100127

2. Equipment type: Dual arm atmospheric wafer handling robot

3. Compatible wafer: 300mm

4. Working environment: atmospheric clean room

5. Supporting unit: Semiconductor EFEM equipment

Application fields:

1. Automatic wafer handling within semiconductor EFEM units

2. Wafer transfer between FOUP wafer box and process station

3. Front end wafer loading and unloading transport for etching and thin film equipment

4. Replacement and maintenance of spare parts for semiconductor equipment malfunctioning robotic arms

5. Use of refurbished and assembled spare parts for second-hand semiconductor equipment

The SCE92100127 dual arm handling robot is a key transport component of 300mm wafer front-end equipment, ensuring efficient and safe wafer transportation

Sinfonia Technology SCE92100127 双臂晶圆搬运机器人 产品展示

SCE92100127.webp.jpg

视频展示


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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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