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Parker Balston SF130952PHP 三气体氮气发生器

发布时间:2026-09-02人气:
  • Parker Balston SF130952PHP 三气体氮气发生器
  • Parker Balston SF130952PHP 三气体氮气发生器
  • Parker Balston SF130952PHP 三气体氮气发生器

Parker Balston SF130952PHP 三气体氮气发生器 

1.产 品 资 料 介 绍:

Parker Balston SF130952PHP 为三气体集成氮气发生器,可为半导体设备提供多路高纯气源供给。
产品特点:
1. 三气路集成输出,可同时输出多路不同纯度氮气,一机多用
2. 内置多级精密过滤,油气水汽去除彻底,输出气体洁净度高
3. 模块化滤芯结构,拆装更换便捷,降低后期维护工时
4. 具备压力流量稳定调控,输出气源压力波动小
5. 机柜式紧凑机身,适配半导体设备机柜安装,支持 7×24 小时连续运行
产品参数:
1. 型号:SF130952PHP
2. 设备类型:三气体集成氮气发生器
3. 进气源:干燥压缩空气
4. 输出:三路高纯氮气独立输出
5. 工作模式:连续不间断产气
应用领域:
1. 半导体工艺设备高纯氮气气源供给
2. 晶圆处理腔体吹扫、气幕保护供气
3. 半导体分析检测仪器配套气源
4. 设备老旧发生器故障备件替换
5. 半导体工厂设备备件库存储备
该 SF130952PHP 三气体氮气发生器输出气源稳定洁净,是半导体产线重要供气配套设备。

Parker Balston SF130952PHP 三气体氮气发生器 产品英文介绍

Parker Balston SF130952PHP is a three gas integrated nitrogen generator that can provide multiple high-purity gas sources for semiconductor equipment.

Product Features:

1. Three gas path integrated output, capable of simultaneously outputting multiple nitrogen gases of different purities, one machine can be used for multiple purposes

2. Built in multi-stage precision filtration, thoroughly removing oil, gas, and water vapor, resulting in high cleanliness of the output gas

3. Modular filter structure, easy disassembly and replacement, reducing maintenance time in the later stage

4. Equipped with stable pressure and flow control, with minimal pressure fluctuations in the output gas source

5. Cabinet style compact body, suitable for semiconductor equipment cabinet installation, supports 7 × 24-hour continuous operation

Product Parameters:

1. Model: SF130952PHP

2. Equipment type: Three gas integrated nitrogen generator

3. Inlet air source: dry compressed air

4. Output: Three independent high-purity nitrogen gas outputs

5. Working mode: Continuous and uninterrupted gas production

Application fields:

1. Supply of high-purity nitrogen gas source for semiconductor process equipment

2. Wafer processing chamber blowing and gas curtain protection supply

3. Supporting gas source for semiconductor analysis and testing instruments

4. Replacement of faulty spare parts for old equipment generators

5. Inventory reserve of spare parts for semiconductor factory equipment

The SF130952PHP three gas nitrogen generator has a stable and clean output gas source, and is an important gas supply supporting equipment for semiconductor production lines.

Parker Balston SF130952PHP 三气体氮气发生器 产品展示

SF130952PHP.webp.jpg

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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