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Yaskawa 4S586-972-3 直线电机控制器

发布时间:2026-09-03人气:
  • Yaskawa 4S586-972-3 直线电机控制器
  • Yaskawa 4S586-972-3 直线电机控制器

Yaskawa 4S586-972-3 直线电机控制器 

1.产 品 资 料 介 绍:

Yaskawa 4S586‑972‑3 直线电机控制器,半导体设备专用运动控制单元,实现直线轴高速高精度闭环运动控制。
产品特点:
1. 支持直线电机全闭环控制,定位精度高,动态响应快
2. 内置故障诊断,过载、过流报警,保护电机与机构
3. 适配设备总线通讯,可与设备主控快速对接交互
4. 板卡模块化结构,插拔更换便捷,减少停机时间
5. 抗干扰能力强,适配半导体机柜复杂电磁工况
产品参数:
1. 设备类型:直线电机伺服控制板卡
2. 控制模式:位置、速度、力多模式切换
3. 供电:24‑48VDC 机柜供电
4. 支持编码器反馈,实现全闭环位置采集
5. 工作温度:5‑50℃,机柜内部使用
应用领域:
1. 半导体晶圆传输直线轴驱动控制
2. 刻蚀设备精密位移平台运动控制
3. 薄膜沉积设备工件直线进给机构
4. 真空检测设备高精度直线运动单元
5. 半导体工艺设备多轴直线模组控制
高速闭环与稳定的抗干扰性能,使 Yaskawa 4S586‑972‑3 成为半导体精密直线运动机构的核心控制部件

Yaskawa 4S586-972-3 直线电机控制器 产品英文介绍

Yaskawa 4S586-972-3 linear motor controller, a motion control unit specifically designed for semiconductor equipment, achieves high-speed and high-precision closed-loop motion control of linear axes.

Product Features:

1. Supports full closed-loop control of linear motors, with high positioning accuracy and fast dynamic response

2. Built in fault diagnosis, overload and overcurrent alarms, protecting motors and mechanisms

3. Adapt to device bus communication, able to quickly interface and interact with device controllers

4. Modular structure of the board, easy to plug and replace, reducing downtime

5. Strong anti-interference ability, suitable for complex electromagnetic working conditions of semiconductor cabinets

Product Parameters:

1. Equipment type: Linear motor servo control board

2. Control mode: Multi mode switching of position, speed, and force

3. Power supply: 24-48VDC cabinet power supply

4. Support encoder feedback to achieve full closed-loop position acquisition

5. Working temperature: 5-50 ℃, used inside the cabinet

Application fields:

1. Linear axis drive control for semiconductor wafer transfer

2. Precision displacement platform motion control of etching equipment

3. Linear feed mechanism for workpieces in thin film deposition equipment

4. High precision linear motion unit for vacuum detection equipment

5. Multi axis linear module control for semiconductor process equipment

The high-speed closed-loop and stable anti-interference performance make Yaskawa 4S586-972-3 the core control component of semiconductor precision linear motion mechanism

Yaskawa 4S586-972-3 直线电机控制器 产品展示

4S586-972-3.webp.jpg

视频展示


其他产品

Honeywell 51403645-100SBHM 驱动模块
 LC-608 I/O模块
 DSAI130D 3BSE003127R1 自动化控制模块 

英文产品

 086351-004 Industrial card
TRICONEX 4210 Industrial card
SAMSUNG DOC-16C Count plate

AMAT 0100-76267AMAT 0190-760507702
3BHB015651P0001AMAT 0190-76053701-00610-8
AMAT 0190-37178AMAT 0190-76101C400/10/1/1/1/00
AMAT 0190-54047AMAT 0190-76142LDGRB-01 3BSE013177R1
AMAT 0190-01486AMAT 0190-76150140CPU67160
AMAT 0190-66024AMAT 0190-761853500/72-01-00 140734-08
AMAT 0190-16010AMAT 0190-76252369-LO-0-M-0-0-0-E
AMAT 0190-54639AMAT 0190-76263PCD231B

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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