1.产 品 资 料 介 绍:
Brooks 6-0000-4085-PC 机器人控制 产品英文介绍
Brooks 6-0000-4085-PC robot controller, a specialized control unit for semiconductor wafer manipulators, is responsible for multi axis motion calculation and equipment signal interaction, ensuring stable and reliable operation.
Product Features:
1. Multi axis synchronous motion control, high precision in wafer handling and positioning, smooth motion trajectory
2. Built in safety logic interlock, real-time collision and overload alarm, protecting the robotic arm and wafer
3. Supports device bus communication and can be integrated with semiconductor host systems to achieve linked operations
4. Board type modular structure, easy disassembly and replacement, shortens equipment downtime maintenance time
5. Anti electromagnetic interference, suitable for complex industrial working conditions of etching and deposition equipment cabinets
Product Parameters:
1. Product type: Semiconductor robot motion control board
2. Supports up to 6 axes for synchronous control of robotic arms
3. Working power supply: 24-48VDC cabinet power supply
4. Communication interface: Ethernet, digital IO signal port
5. Working temperature: 5-50 ℃, used inside the cabinet
Application fields:
1. Motion control of semiconductor vacuum wafer transfer robot arm
2. Drive of wafer handling mechanism inside and outside the etching equipment chamber
3. Material transfer between film deposition equipment box and process chamber
4. Multi axis robot logic control for wafer inspection equipment
5. Signal linkage processing of automated vacuum equipment subsystem
The powerful multi axis computing and safety protection capabilities make Brooks 6-0000-4085-PC the core control component of semiconductor wafer handling robots.
Brooks 6-0000-4085-PC 机器人控制 产品展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218




