Edwards A730-02-983干式涡旋真空增压泵

Edwards A730-02-983干式涡旋真空增压泵 

1.产 品 资 料 介 绍：

Edwards A730-02-983干式涡旋真空增压泵 产品英文介绍

Edwards A730-02-983 (XDS35i) dry vortex vacuum pump, a front-end dry pump matched with semiconductor equipment molecular pump, with oil-free vortex structure, used to establish backing front-end vacuum.

Product Features:

1. Fully dry vortex structure, with bearings isolated from the vacuum chamber and no oil vapor backflow, to avoid chamber contamination

2. Non contact operation of dynamic and static vortices, low mechanical wear, supporting continuous production operation for 7 × 24 hours

3. Equipped with a gas damper, it can handle water vapor and mildly condensable process gases, reducing scaling in the pump chamber

4. Integrated remote IO interface, capable of transmitting temperature and fault status, and connecting to the machine's main control alarm

5. Air cooled cooling, compact body, low vibration and low noise, suitable for installation in small spaces inside the machine

Product Parameters:

1. Pump type: Dry vortex vacuum pump

2. Extraction speed: 35m ³/h

3. Extreme vacuum: 7 × 10 ⁻ ³ mbar

4. Power supply: single-phase AC200-230V, 50-60Hz

5. Inlet flange NW40, air-cooled, remote IO communication

Application fields:

1. Semiconductor turbine molecular pump matched with front-end pumping

2. Rough vacuum extraction of small load lock chamber

3. Wafer inspection and measurement equipment vacuum unit

4. Front stage pump for small PVD and plasma cleaning equipment

5. Obtaining rough vacuum from analytical instruments and research vacuum systems

Clean, oil-free, and compact in size, Edwards A730-02-983 has become the mainstream front-end vortex pump for small and medium-sized vacuum systems.

Edwards A730-02-983干式涡旋真空增压泵 产品展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218