AE 31512415-120直流电源模块

AE 31512415-120直流电源模块 

1.产 品 资 料 介 绍：

AE 31512415-120直流电源模块 产品英文介绍

AE 31512415-120 DC power module, semiconductor PVD process high-power DC power supply unit.

Product Features:

1. Constant voltage and constant current closed-loop output, small ripple, stable process output

2. Rapid arc suppression, multiple protections against overvoltage, overcurrent, and overheating

3. Support pulse mode and adapt to reactive sputtering conditions

4. Modular rack, easy disassembly and assembly, reducing downtime

5. Simulate IO interface and remotely set read status

Product Parameters:

1. Equipment type: Magnetron sputtering DC power module

2. Supports constant voltage, constant current, and pulse output

3. Integrated arc detection and protection function

4. Simulate IO communication docking with the main control of the whole machine

5. Working temperature of 5-50 ℃, rack installation

Application fields:

1. Power supply for semiconductor PVD magnetron sputtering target material

2. Power supply for metal thin film deposition process

3. Reactive sputtering vacuum coating equipment

4. Power supply for plasma surface treatment equipment

5. AMAT platform process chamber supporting power supply

Excellent arc suppression performance makes AE 31512415-120 an important power supply component for thin film processes

AE 31512415-120直流电源模块 产品展示

视频展示

其他产品

EMERSON VE3007 KJ2005X1-BA1 12P4375X012 输出模块
HIMA F7126 数字输入模块
HIMA F7131 SIS电源监视模块

英文产品

BENTLY 3500/15-05-05-00 Power supply module
12P2532X162-233A Input/output module
KJ3222X1-BA1 CE4003S2B3 Control module

The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218