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AE 31512411-220电源模块

发布时间:2026-09-03人气:
  • AE 31512411-220电源模块
  • AE 31512411-220电源模块
  • AE 31512411-220电源模块

AE 31512411-220电源模块 

1.产 品 资 料 介 绍:

AE 31512411‑220 直流电源模块,半导体真空工艺大功率直流供电单元,针对靶材溅射场景优化。
产品特点:
1. 动态响应快,负载突变时迅速调整功率,维持工艺条件稳定
2. 智能打火甄别,区分工艺正常放电与恶性电弧,减少不必要停机
3. 本地面板可查看运行参数,故障信号直接输出给机台做报警逻辑
4. 内部散热风道优化,耐受车间机柜强射频电磁环境
5. 热插拔式机架结构,现场替换无需复杂接线
产品参数:
1. 设备类型:工艺直流功率模块
2. 支持脉冲直流输出,占空比可调
3. 集成电压电流实时采样回路
4. 模拟信号接口,外部功率设定
5. 工作温度 5‑50℃,机柜安装
应用领域:
1. 磁控溅射金属靶功率供给
2. 化合物薄膜反应溅射工艺
3. 半导体腔体等离子激发供电
4. 镀膜产线真空负载直流驱动
5. 各类强放电真空工艺设备配套
优异的动态调节性能,使 AE 31512411‑220 成为溅射产线关键功率部件。

AE 31512411-220电源模块 产品英文介绍

AE 31512411-220 DC power module, a high-power DC power supply unit for semiconductor vacuum process, optimized for target sputtering scenarios.

Product Features:

1. Fast dynamic response, quickly adjust power in case of sudden load changes, and maintain stable process conditions

2. Intelligent ignition discrimination, distinguishing between normal discharge and malignant arc in the process, reducing unnecessary downtime

3. The local panel can view operating parameters and output fault signals directly to the machine for alarm logic

4. Optimization of internal heat dissipation ducts to withstand strong RF electromagnetic environments in workshop cabinets

5. Hot swappable rack structure, on-site replacement does not require complex wiring

Product Parameters:

1. Equipment type: Process DC power module

2. Supports pulse DC output with adjustable duty cycle

3. Integrated voltage and current real-time sampling circuit

4. Analog signal interface, external power setting

5. Working temperature of 5-50 ℃, cabinet installation

Application fields:

1. Power supply for magnetron sputtering metal targets

2. Reactive sputtering process for compound thin films

3. Semiconductor cavity plasma excitation power supply

4. Vacuum load DC drive for coating production line

5. Supporting equipment for various strong discharge vacuum processes

Excellent dynamic adjustment performance makes AE 31512411-220 a key power component in the sputtering production line.

AE 31512411-220电源模块 产品展示

31512411-220.webp.jpg

视频展示


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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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