ATH V14621B0涡轮分子泵

ATH V14621B0涡轮分子泵  

1.产 品 资 料 介 绍：

ATH V14621B0涡轮分子泵 产品英文介绍

ATH V14621B0 magnetic levitation turbo molecular pump is a commonly used disassembly spare part for vacuum equipment, with stable oil-free vacuum performance.

5 product features:

1. Magnetic levitation bearings, oil-free and non-contact, will not contaminate the vacuum chamber.

2. Composite impeller design, capable of withstanding high front-end pressure.

3. Support multi angle installation and flexible internal layout of the cabinet.

4. Equipped with a purge gas interface, it can resist some corrosive process gases.

5. Equipped with status monitoring, it automatically protects the rotor in case of abnormalities.

5 product parameters:

1. Nitrogen pumping rate is 500L/s.

2. Extreme vacuum of 10 ⁻¹⁰ mbar.

3. Integrated driver, supporting RS232/485 communication.

4. Air cooled cooling, intake flange DN160.

5. The working environment temperature is 10-40 ℃.

5 application areas:

1. High vacuum spare parts for semiconductor etching equipment.

2. PVD and PECVD coating equipment vacuum main pump.

3. Vacuum unit for electron microscopy and mass spectrometry analysis instruments.

4. Ion beam processing equipment cavity extraction.

5. Repair and replacement of old pumps in scientific research vacuum chambers.

Overall, ATH V14621B0 is a discontinued model, and most of the parts available on the market are refurbished. It is necessary to check the rotor condition before putting it into use.

ATH V14621B0涡轮分子泵  产品展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218