1.产 品 资 料 介 绍：
AE 3150258-150射频发生器 产品英文介绍
AE 3150258-150 is a specialized RF generator for semiconductor equipment, commonly used for replacing faulty spare parts in wafer processing equipment and ensuring stable plasma output.
5 product features:
1. Closed loop power control ensures stable power output under load fluctuations and guarantees process repeatability.
2. Rapid arc suppression, instant power reduction during chamber ignition, protecting vulnerable components inside the chamber.
3. Supports pulse power mode and can adapt to various plasma process adjustment requirements.
4. Analog and digital dual control interfaces, convenient for remote control and status reading of device hosts.
5. Optimization of chassis air duct, forced air cooling, and reliable heat dissipation for long-term continuous operation in the workshop.
5 product parameters:
1. Rated output power of 3kW, operating frequency of 13.56MHz.
2. Three phase AC input 208-480VAC, suitable for power supply in semiconductor workshops.
3. Output impedance 50 Ω, power regulation accuracy ± 1%.
4. Standard 2U rack mounted installation with forced air cooling for heat dissipation.
5. The working environment temperature is 0-45 ℃, suitable for clean equipment rooms.
5 application areas:
1. Plasma RF power supply for semiconductor etching equipment.
2. PVD physical vapor deposition equipment process power supply.
3. PECVD chemical vapor deposition equipment is used in conjunction with it.
4. Replacement of old power supply failure in wafer processing equipment.
5. Maintenance of panel coating plasma process equipment.
Overall, AE 3150258-150 is a discontinued model, and the market mainly focuses on dismantling and refurbishing spare parts. Before using it, it is necessary to check the material number of the entire machine to confirm the match
AE 3150258-150射频发生器 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
