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Semitool 900T0397-501控制箱总成

发布时间:2026-09-07人气:
  • Semitool 900T0397-501控制箱总成
  • Semitool 900T0397-501控制箱总成
  • Semitool 900T0397-501控制箱总成

Semitool 900T0397-501控制箱总成  

1.产 品 资 料 介 绍:

Semitool 900T0397‑501 退火控制箱总成,半导体湿法退火设备整机控制单元,多用于机台故障备件替换。
产品特点 5 条:
1、一体化集成机箱,统筹退火工艺温度、气体、时序整套逻辑控制。
2、多组专用圆形接插件,原生匹配 Semitool 机台线束,拆装直接对位。
3、具备工艺参数存储,可调用多套退火配方,保障晶圆工艺一致性。
4、内置故障自检,异常状态输出报警信号,方便快速定位设备问题。
5、机箱防护结构,耐受车间工艺环境,减少粉尘、湿气对内部板卡影响。
产品参数 5 条:
1、交流整机供电适配设备机柜供电规格。
2、多路数字 IO、模拟量信号,对接加热器、流量计、阀门组件。
3、支持机台内部总线交互,接收上位机下发工艺指令。
4、机柜机架式安装结构。
5、工作环境温度 18‑30℃,适配半导体超净车间。
应用领域 5 条:
1、Semitool 湿法退火设备整机主控单元。
2、晶圆湿法处理退火工艺系统备件。
3、半导体晶圆清洗后退火流程控制。
4、芯片制造湿法工艺设备电气控制。
5、旧 Semitool 机台整套控制箱故障更换。
综合来看 Semitool 900T0397‑501 属于机台专属成套控制总成,市面以拆机备件为主,上机前核对硬件版本,完成工艺联调再投入生产

Semitool 900T0397-501控制箱总成 产品英文介绍

Semitool 900T0397-501 Annealing Control Box Assembly, a complete control unit for semiconductor wet annealing equipment, is commonly used for replacing machine failure spare parts.

5 product features:

1. Integrated chassis, coordinating annealing process temperature, gas, and timing logic control.

2. Multiple sets of specialized circular connectors, native matching Semitool machine harness, direct disassembly and alignment.

3. Equipped with process parameter storage, multiple annealing formulas can be called to ensure wafer process consistency.

4. Built in fault self check, abnormal state output alarm signal, convenient for quickly locating equipment problems.

5. The protective structure of the chassis can withstand the workshop process environment and reduce the impact of dust and moisture on internal boards.

5 product parameters:

1. Exchange the power supply specifications of the whole machine to adapt to the equipment cabinet.

2. Multiple digital IO and analog signals, connected to heaters, flow meters, and valve components.

3. Support internal bus interaction of the machine and receive process instructions issued by the upper computer.

4. Cabinet rack mounted installation structure.

5. The working environment temperature is 18-30 ℃, suitable for semiconductor ultra clean workshops.

5 application areas:

1. Semitool wet annealing equipment main control unit.

2. Spare parts for wafer wet processing annealing process system.

3. Control of annealing process after semiconductor wafer cleaning.

4. Electrical control of wet process equipment for chip manufacturing.

5. replace the entire control box of the old Semitool machine due to malfunction.

Overall, Semitool 900T0397-501 belongs to the exclusive complete set of control assemblies for the machine. The market mainly consists of disassembled spare parts. Before starting the machine, the hardware version should be checked, and the process should be debugged before being put into production

Semitool 900T0397-501控制箱总成 产品展示

900T0397-501.webp.jpg

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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