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Powerex SF130872PHA 空气压缩机

发布时间:2026-09-08人气:
  • Powerex SF130872PHA 空气压缩机
  • Powerex SF130872PHA 空气压缩机
  • Powerex SF130872PHA 空气压缩机

Powerex SF130872PHA 空气压缩机 

1.产 品 资 料 介 绍:

Powerex SF130872PHA 空气压缩机,半导体设备提供洁净气源的无油供气单元。
产品特点:
1、无油涡旋结构,输出洁净压缩空气,不会污染工艺腔体
2、运行震动小、噪音低,适合车间机柜内部长期运转
3、自带过热过载保护,出现异常自动停机防护整机
4、部件拆装简单,日常维护保养工作量比较少
5、支持持续不间断出力,适配工厂 7×24 小时量产工况
产品参数:
1、输出洁净无油压缩气源,匹配设备气源接口
2、内置进气过滤组件,过滤外界空气中杂质
3、具备高温、过载停机保护触发机制
4、适配车间设备间常规环境温度条件
5、可输出运行状态信号,对接设备监控系统
应用领域:
1、半导体机台气动阀门、气缸驱动气源供给
2、晶圆处理设备吹扫、隔离气工艺供气
3、老旧产线空压机故障后的备件替换
4、精密工业设备洁净压缩空气配套
5、设备大修后整套气路系统调试使用
Powerex SF130872PHA 输出气源的洁净度,直接关系机台气动部件寿命与工艺稳定性。

Powerex SF130872PHA 空气压缩机 产品英文介绍

Powerex SF130872PHA air compressor is an oil-free gas supply unit that provides clean gas source for semiconductor equipment.

Product Features:

1. Oil free vortex structure, outputting clean compressed air without polluting the process chamber

2. Low vibration and noise during operation, suitable for long-term operation inside workshop cabinets

3. Equipped with overheating and overload protection, the machine automatically shuts down in case of abnormal conditions

4. The disassembly and assembly of components are simple, and the daily maintenance workload is relatively low

5. Support continuous uninterrupted output and adapt to the factory's 7 × 24-hour mass production conditions

Product Parameters:

1. Output clean oil-free compressed air source, matched with equipment air source interface

2. Built in intake filter component, filters impurities in the outside air

3. Equipped with high temperature and overload shutdown protection triggering mechanism

4. Adapt to the conventional environmental temperature conditions between workshop equipment

5. Can output operational status signals and interface with equipment monitoring systems

Application fields:

1. Pneumatic valves and cylinder driven air supply for semiconductor machines

2. Wafer processing equipment blowing, isolation gas process gas supply

3. Replacement of spare parts for old production line air compressors after failure

4. Clean compressed air matching for precision industrial equipment

5. Debugging and use of the entire gas circuit system after equipment overhaul

The cleanliness of the output gas source of Powerex SF130872PHA directly affects the service life and process stability of the pneumatic components of the machine.

Powerex SF130872PHA 空气压缩机 产品展示

SF130872PHA.webp.jpg

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218 

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