Brooks Automation 002-7090-11大气晶圆机器人
1.产 品 资 料 介 绍：
Brooks Automation 002-7090-11大气晶圆机器人 产品英文介绍
Brooks Automation 002-7090-11 atmospheric wafer robot is a robotic arm responsible for wafer transfer in semiconductor EFEM units.
Product Features:
1. Clean grade structural design, low dust production, suitable for clean workshop environment
2. Smooth movement with minimal shaking, high-speed handling can also reduce the risk of wafer fragments
3. Equipped with collision protection, it can stop the machine promptly in case of abnormal touch for protection
4. Original machine module, in situ disassembly and replacement, no need to modify the machine structure
5. The cycle operation has good durability and is suitable for long-term high-frequency wafer picking and placing on the production line
Product Parameters:
1. Match the communication interface of the EFEM device to receive motion commands
2. Equipped with high-precision repetitive positioning to ensure wafer handover alignment
3. Adapt to the standard operating temperature conditions of clean workshops
4. Support vacuum gripper signal feedback to confirm wafer picking status
5. Fault output alarm signal, convenient for operation and maintenance to quickly troubleshoot
Application fields:
1. The internal wafers of EFEM equipment are transferred between the wafer stage and the machine
2. Wafer cleaning equipment atmospheric end loading and unloading operations
3. Detection and measurement equipment for automatic wafer feeding and unloading transport
4. Old machine, atmospheric mechanical arm malfunction, damaged parts replacement
5. Debugging and calibration of wafer handling process after equipment maintenance
Brooks Automation 002-7090-11 is responsible for atmospheric wafer circulation, and its operational stability directly affects the overall production capacity and fragmentation rate of the machine.
Brooks Automation 002-7090-11大气晶圆机器人 产品展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
