Kyoto Denkiki KDS-30350WF输出直流电源模块
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Kyoto Denkiki KDS-30350WF输出直流电源模块 产品英文介绍
Kyoto Denkiki KDS-30350WF Kyoto Electric Machine DC Power Supply Module, commonly used to provide stable DC high voltage for Hitachi etching machines.
1. Dual independent voltage regulation output, with small voltage fluctuations when the load changes;
2. Integrated with multiple protections, the output can be quickly cut off due to overvoltage, overcurrent, and overheating;
3. Power correction circuit to reduce harmonic interference and adapt to cabinet environment;
4. Can provide feedback on operation and alarm signals to the equipment master control;
5. Rack mounted structure, easy disassembly and replacement, and convenient maintenance.
1. Input three-phase AC 200~220V;
2. Rated output 350V, 30A;
3. Dual DC output;
4. Compatible with Hitachi M-712E etching machine;
5. Air cooling for heat dissipation.
1. Hitachi M-712E etching machine cavity DC power supply;
2. Power supply for semiconductor STI shallow trench etching process;
3. Etching chamber bias power supply;
4. Etching cavity electrode driving power supply;
5. High voltage DC unit of dry etching equipment.
This KDS-30350WF has stable output and is a key power supply spare part in Hitachi etching machines
Kyoto Denkiki KDS-30350WF输出直流电源模块 产品展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
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