1.产 品 资 料 介 绍：
Nikon 4T070-338-1放大器模块 产品英文介绍
Nikon 4T070-338-1 (SPA494E) is the top servo amplifier module of Nikon NSR lithography machine RY-RU, responsible for driving the precision VCM voice coil motor corresponding to the exposure stage, ensuring dynamic positioning during scanning exposure.
1. High speed response of dynamic current loop, real-time fine-tuning of output torque during scanning exposure stage, and suppression of high-frequency micro vibration of the platform;
2. Equipped with a built-in signal sampling circuit, it continuously collects motor current and position deviation, and provides real-time feedback to the main control;
3. Multi layer shielding board design to isolate electromagnetic interference caused by laser and radio frequency inside the lithography machine;
4. Equipped with graded fault alarms, distinguishing different types of faults such as slight drift, overload, short circuit, etc., for easy maintenance;
5. Standard rack slot type board, supports hot swappable maintenance, shortens the downtime for lithography machine maintenance.
6. Supporting model SPA494E;
7. Drive type: Voice coil motor VCM;
8. Closed loop sampling: high-speed grating position feedback;
9. Power supply specification: DC48V;
10. Compatible models: NSR series stepper scanning lithography machine.
11. Drive the RY-RU axis voice coil motor on the top of the lithography machine worktable;
12. Dynamic attitude compensation control during scanning exposure process;
13. Quick correction of small displacement of the crystal cone;
14. Multi axis synchronous motion torque output during exposure period;
15. High precision scanning servo drive unit for lithography equipment.
This 4T070-338-1 directly affects the etching accuracy of scanning exposure and is a critical servo drive spare part in the lithography machine motion system.
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
