1.产 品 资 料 介 绍:
Nikon 4S025-567驱动器PCB卡 产品英文介绍
Nikon 4S025-567 driver PCB card, model IUDRV2-X8A, compatible with NSR-S620D immersion lithography machine, controls internal actuator drivers.
1. Output driving signals to control the precision execution components of the immersion unit;
2. Equipped with signal shielding to reduce electromagnetic interference near the optical path;
3. Real time monitoring of load status, triggering alarms for abnormalities;
4. CPCI slot board, easy to disassemble and maintain;
5. High speed data exchange with the main control board.
1. Nickname IUDRV2-X8A;
2. Compatible with NSR-S620D immersion lithography machine;
3. Board type driver PCB;
4. Bus CPCI;
5. Install in the cabinet slot.
1. Drive control of immersion unit mechanism in lithography machine;
2. Action output of immersion liquid related execution components;
3. Drive the small fine-tuning mechanism of the cavity;
4. Drive circuit status acquisition and monitoring;
5. Immersion lithography equipment driver control board.
This 4S025-567 is a dedicated driver board for immersion units, ensuring stable operation of the immersion system

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218



