1.产 品 资 料 介 绍:
NIKON 4S015-479数据紧凑模块 产品英文介绍
NIKON 4S015-479 is a compact data module for Nikon lithography machines, responsible for collecting, compressing, and transmitting internal detection data of equipment.
1. High speed collection of raw data from various sensors;
2. On board data compression to reduce bus transmission load;
3. Cache temporary process data to ensure continuous sampling;
4. Built in self-test, data abnormal output alarm;
5. Slot type board, easy to install and replace.
1. Compatible with NSR series stepper scanning lithography machines;
2. Board type: Compact data acquisition module;
3. Signal interface: dedicated internal high-speed bus;
4. Installation method: Cabinet CPCI slot;
5. The working temperature is 5-40 ℃.
1. Raw data acquisition of lithography machine sensors;
2. Check data compression and temporary caching;
3. The subsystem transmits measurement data to the main control;
4. Real time data forwarding during the exposure process;
5. Lithography equipment data acquisition unit.
This 4S015-479 is responsible for data collection and forwarding of lithography machines, ensuring stable uploading of various measurement data

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218




