1.产 品 资 料 介 绍：
AE 3150017-026射频发生器 产品英文介绍
AE 3150017-026 RF generator belongs to the RF30S series solid-state RF power supply, providing stable RF energy for semiconductor plasma processes.
Product Features:
1. Power closed-loop regulation, minimal plasma state fluctuations, and good batch process consistency
2. Built in arc suppression function, quickly extinguishing arcs and reducing wafer surface damage
3. Small rack mounted body, flexible installation layout inside the cabinet
4. Support remote signal reading and writing, convenient for machine integration monitoring
5. Built in multiple protection mechanisms, automatically cutting off RF output in case of abnormal load
Product Parameters:
6. Model: 3150017-026
7. RF type: RF30S solid-state RF generator
8. Rated output power: 3000W
9. Operating frequency: 13.56MHz
10. Heat dissipation method: air-cooled heat dissipation
Application fields:
11. Plasma power supply for semiconductor PVD sputtering coating
12. RF source for CVD thin film deposition equipment
13. Wafer plasma etching process
14. Flat panel display coating process
15. Replacement of spare parts for RF power supply in semiconductor production lines
Plasma coating equipment malfunction replacement, AE 3150017-026 RF generator adapted to the original equipment circuit
AE 3150017-026射频发生器 产品展示
视频展示
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
