NSK 51161-802-001接口机器人

NSK 51161-802-001接口机器人  

1.产 品 资 料 介 绍：

NSK 51161-802-001接口机器人  产品英文介绍

NSK 51161-802-001 interface robot, semiconductor equipment wafer transfer manipulator, responsible for the picking and placing operations between the machine and the wafer box.

Product Features:

1. Dedicated structure for cleanroom, low particle generation, protecting wafer surface from contamination

2. Multi joint flexible movement, gentle wafer picking, reducing the risk of wafer breakage

3. Comes with a standard communication interface, which can quickly connect to the machine's main control system

4. Built in position feedback sensor, high repeatability accuracy

5. Lightweight arm design, fast start stop response, and shortened loading and unloading cycle time

Product Parameters:

6. Model: 51161-802-001

7. Working environment: Semiconductor Class1 clean environment

8. Load: Suitable for standard wafer carriers

9. Communication: Machine specific motion interface protocol

10. Structure: Multi joint vacuum suction robotic arm

Application fields:

11. Transfer operation from semiconductor wafer box to process chamber

12. Etching equipment for wafer loading and unloading transportation

13. Crystal Circle Handling on Thin Film Deposition Machine Platform

14. Automatic wafer picking and placing equipment for wafer inspection

15. Replacement of spare parts for NSK semiconductor transmission manipulator

Automated wafer loading and unloading production line maintenance, NSK 51161-802-001 interface robot adapted to the original machine communication circuit

NSK 51161-802-001接口机器人  产品展示

视频展示

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英文产品

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218