1.产 品 资 料 介 绍：
Nikon 4S013-284 光学平台组件，是尼康光刻机内部光学基准承载模组，承载镜头组与光学检测元件。 产品特点：
- 高刚性铸铁基座，抑制微小振动，保障曝光光路稳定
- 多点精密调平机构，可微调光学倾角，修正光路偏差
- 表面经过时效处理，温变环境下形变极低
- 集成定位销结构，更换时快速复位，减少光路校准工时
- 抗粉尘密封设计，保护内部光学元件不受洁净环境微粒影响 产品参数：
- 型号：4S013-284
- 材质：低应力精密铸件
- 功能：光路承载与基准定位
- 调节方式：多点微米级微调
- 适配设备：尼康 NSR 系列光刻机 应用领域：
- DUV 光刻机投影光学系统支撑
- 曝光光路对准组件承载
- 光刻设备离焦检测光学单元底座
- 掩膜台光学监测模组固定
- 尼康光刻机光学平台备件更换 光刻机光学系统维护更换，Nikon 4S013-284 光学平台组件可维持原有光路基准精度。
Nikon 4S013-284光学平台组件 产品英文介绍
The Nikon 4S013-284 optical platform component is an internal optical reference module for Nikon lithography machines, which carries the lens assembly and optical detection components.
Product Features:
1. High rigidity cast iron base, suppressing small vibrations and ensuring stable exposure light path
2. Multi point precision leveling mechanism, capable of fine-tuning optical tilt angle and correcting optical path deviation
3. The surface has undergone aging treatment, resulting in extremely low deformation in temperature changing environments
4. Integrated positioning pin structure, quick reset during replacement, reducing optical path calibration time
5. Anti dust sealing design, protecting internal optical components from the influence of clean environmental particles
Product Parameters:
6. Model: 4S013-284
7. Material: Low stress precision casting
8. Function: Optical path bearing and reference positioning
9. Adjustment method: Multi point micro adjustment
10. Compatible equipment: Nikon NSR series lithography machine
Application fields:
11. DUV lithography machine projection optical system support
12. Exposure light path alignment component carrier
13. Photolithography equipment defocus detection optical unit base
14. Fixing of optical monitoring module for mask stage
15. Replacement of Nikon lithography machine optical platform spare parts
The optical system of the lithography machine needs maintenance and replacement, and the Nikon 4S013-284 optical platform component can maintain the original optical path reference accuracy.
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
