Paramount 3156330-116射频发生器

Paramount 3156330-116射频发生器   

1.产 品 资 料 介 绍：

Paramount 3156330-116射频发生器    产品英文介绍

Paramount 3156330-116 RF generator, belonging to AE Paramount 3013 digital RF power supply, focuses on real-time impedance control of plasma.

Product Features:

1. Digital power architecture, millisecond level frequency tuning, easy adaptation to dynamically changing plasma loads

2. Integrated pulse synchronization function, supporting precise timing control, suitable for high-end etching process requirements

3. High precision built-in impedance measurement, real-time feedback of cavity status, reducing process drift

4. Half rack compact body, water cooling+air cooling mixed heat dissipation, stable temperature rise under high load for a long time

5. Intelligent arc management mechanism, quickly suppressing sudden arcs and reducing the probability of wafer damage

Product Parameters:

1. Model: 3156330-116

2. Series: Paramount 3013

3. Rated power: 3000W

4. Operating frequency: 13.56MHz

5. Communication: Supports EtherCAT and analog interfaces

Application fields:

1. High aspect ratio semiconductor dielectric etching process

2. PECVD plasma thin film deposition equipment

3. Plasma source for wafer cavity cleaning

4. Supporting atomic layer deposition PEALD process

5. Replacement of spare parts for Paramount 3013 series RF power supply

Upgrade and maintenance of high-end plasma process equipment, Paramount 3156330-116 RF generator can stably match the original control system of the machine

Paramount 3156330-116射频发生器    产品展示

视频展示

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The content is from Ruichang Mingsheng Automation Equipment Co., LTD

Contact: +86 15270269218