1.产 品 资 料 介 绍：
AMAT 0190-51186远程等离子体源 产品英文介绍
AMAT 0190-51186 remote plasma source is a matching RPS unit of Endura machine, which generates active free radicals outside the chamber for dry cleaning of the chamber.
Product Features:
1. Plasma is excited outside the cavity to avoid direct contact between the wafer and the arc, reducing the risk of device damage
2. Efficiently decompose clean gases such as NF ∝ to improve the efficiency of removing by-products from the chamber
3. Integrated cavity structure, low particle release, maintaining a clean process environment
4. Built in temperature and power monitoring, automatic shutdown protection for abnormal working conditions
5. Standardized interface assembly, easy disassembly and assembly, reducing machine maintenance downtime
Product Parameters:
6. Model: 0190-51186
7. Type: Remote Plasma Source RPS
8. Compatible machine: AMAT Endura series
9. Working gas: Clean gases such as NF ∝
10. Cooling method: water-cooled structure
Application fields:
11. Endura PVD equipment chamber dry cleaning
12. Removal of polymers inside CVD deposition chamber
13. Regular chamber maintenance of semiconductor thin film machine
14. Plasma active gas supply unit
15. AMAT Endura equipment RPS spare parts replacement
Thin film process chamber maintenance and replacement, AMAT 0190-51186 remote plasma source and original machine gas path, control signal perfectly matched
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The content is from Ruichang Mingsheng Automation Equipment Co., LTD
Contact: +86 15270269218
